EP 2035326 A1 20090318 - SENSOR HAVING DIODE PIXELS AND METHOD FOR PRODUCING THE SAME
Title (en)
SENSOR HAVING DIODE PIXELS AND METHOD FOR PRODUCING THE SAME
Title (de)
SENSOR MIT DIODENPIXELN UND VERFAHREN ZU SEINER HERSTELLUNG
Title (fr)
CAPTEUR AYANT DES PIXELS A DIODES ET PROCÉDÉ DE FABRICATION DUDIT CAPTEUR
Publication
Application
Priority
- EP 2007053932 W 20070423
- DE 102006028435 A 20060621
Abstract (en)
[origin: WO2007147663A1] The invention relates to a sensor, especially for location-independent detection. Said sensor comprises a substrate (1), at least one microstructured sensor element (52) having an electrical property that varies with temperature, and at least one membrane (36.1) above a cavern (26, 74, 94), the sensor element (52) being arranged on the lower face of the at least one membrane (36.1), and the sensor element (52) being connected via leads (60, 62; 98-1, 98-2, 100-1, 100-2) which extend in, on or below the membrane (36.1). According to the invention, especially a plurality of sensor elements (52) can be configured as diode pixels in a monocrystalline layer that is formed by epitaxial growth. In the membrane (36.1), suspension springs (70) can be configured that receive the individual sensor elements (52) in an elastic and insulating manner.
IPC 8 full level
B81B 3/00 (2006.01); G01J 5/10 (2006.01); G01K 7/01 (2006.01)
CPC (source: EP US)
B81B 3/0081 (2013.01 - EP US); G01J 5/06 (2013.01 - EP US); G01J 5/20 (2013.01 - EP US); B81B 2201/0278 (2013.01 - EP US); B81B 2203/0109 (2013.01 - EP US); B81B 2207/015 (2013.01 - EP US); B81C 2201/0109 (2013.01 - EP US)
Citation (search report)
See references of WO 2007147663A1
Designated contracting state (EPC)
DE FR IT
Designated extension state (EPC)
AL BA HR MK RS
DOCDB simple family (publication)
DE 102006028435 A1 20071227; EP 2035326 A1 20090318; EP 2035326 B1 20110615; JP 2009541978 A 20091126; JP 2013151057 A 20130808; JP 5559369 B2 20140723; US 2011002359 A1 20110106; US 8749013 B2 20140610; WO 2007147663 A1 20071227
DOCDB simple family (application)
DE 102006028435 A 20060621; EP 07728389 A 20070423; EP 2007053932 W 20070423; JP 2009515793 A 20070423; JP 2013010529 A 20130123; US 30267707 A 20070423