EP 2040105 B1 20111228 - 2-axis driving electromagnetic scanner
Title (en)
2-axis driving electromagnetic scanner
Title (de)
Durch zwei Achsen angetriebener elektromagnetischer Scanner
Title (fr)
Scanner électromagnétique à 2 axes d'entraînement
Publication
Application
Priority
KR 20070096947 A 20070921
Abstract (en)
[origin: EP2040105A1] A 2-axis driving electromagnetic scanner (100), having a structure in which a mirror (131) is separated from a driving unit and directly driven, is provided. The electromagnetic scanner includes: an outer driving unit (120) which is capable of rotating around a first axis; an inner driving unit (133) which is suspended from the outer driving unit (120) so as to rotate around a second axis perpendicular to the first axis; and a stage (131) which is located on an upper surface of the inner driving unit (133) so as to rotate together with the inner driving unit (133). In the electromagnetic scanner (100), the stage is connected to the inner driving unit (133) by a link unit (136) protruding from a center of a lower surface of the stage (131).
IPC 8 full level
G02B 26/08 (2006.01); G02B 26/10 (2006.01)
CPC (source: EP KR US)
B81B 7/02 (2013.01 - KR); G02B 26/085 (2013.01 - EP KR US); G02B 26/101 (2013.01 - EP US); G02B 26/105 (2013.01 - KR)
Citation (examination)
US 2003214460 A1 20031120 - KOVACS SANDOR L [US]
Designated contracting state (EPC)
DE FR GB
DOCDB simple family (publication)
EP 2040105 A1 20090325; EP 2040105 B1 20111228; JP 2009075587 A 20090409; JP 5085476 B2 20121128; KR 101345288 B1 20131227; KR 20090031104 A 20090325; US 2009080049 A1 20090326; US 7724411 B2 20100525
DOCDB simple family (application)
EP 08162986 A 20080826; JP 2008237851 A 20080917; KR 20070096947 A 20070921; US 4572208 A 20080311