EP 2044331 B1 20110615 - METHOD FOR DETERMINING A STATEMENT OF A STATE OF A TURBOMOLECULAR PUMP AND A TURBOMOLECULAR PUMP
Title (en)
METHOD FOR DETERMINING A STATEMENT OF A STATE OF A TURBOMOLECULAR PUMP AND A TURBOMOLECULAR PUMP
Title (de)
VERFAHREN ZUR ERMITTLUNG EINER AUSSAGE ÜBER EINEN ZUSTAND EINER TURBOMOLEKULARPUMPE SOWIE EINE TURBOMOLEKULARPUMPE
Title (fr)
PROCÉDÉ PERMETTANT DE DÉTERMINER UNE INDICATION DE L'ÉTAT D'UNE POMPE TUBOMOLÉCULAIRE ET POMPE TURBOMOLÉCULAIRE
Publication
Application
Priority
- EP 2007056248 W 20070622
- DE 102006034478 A 20060726
Abstract (en)
[origin: WO2008012150A1] The invention relates to a method for determining a statement of a state of a turbomolecular pump and a turbomolecular pump, wherein a vibration curve is determined with a vibration sensor (10) connected to the turbomolecular pump. The determined vibration curve is transferred to an evaluation device (12), wherein vibrations are detected by a filter (16) in the evaluation device (12) and then compared to comparative values. If a threshold value is exceeded, a warning signal is transferred to a monitoring system (30) by a remote data transfer device (28). The method allows for online-monitoring of turbomolecular pumps.
IPC 8 full level
F04D 19/04 (2006.01); F04D 27/02 (2006.01); F04D 29/66 (2006.01); G01M 99/00 (2011.01)
CPC (source: EP US)
F04D 19/042 (2013.01 - EP US); F04D 27/001 (2013.01 - EP US); F04D 29/668 (2013.01 - EP US)
Designated contracting state (EPC)
CH DE FR GB IT LI
DOCDB simple family (publication)
DE 102006034478 A1 20080131; CN 101495760 A 20090729; CN 101495760 B 20110810; EP 2044331 A1 20090408; EP 2044331 B1 20110615; JP 2009544888 A 20091217; RU 2009106215 A 20100910; US 2010054957 A1 20100304; WO 2008012150 A1 20080131
DOCDB simple family (application)
DE 102006034478 A 20060726; CN 200780028225 A 20070622; EP 07765561 A 20070622; EP 2007056248 W 20070622; JP 2009521180 A 20070622; RU 2009106215 A 20070622; US 37491707 A 20070622