EP 2044404 A4 20121024 - DISCRETE POLARIZATION STATE ROTATABLE COMPENSATOR SPECTROSCOPIC ELLIPSOMETER SYSTEM, AND METHOD OF CALIBRATION
Title (en)
DISCRETE POLARIZATION STATE ROTATABLE COMPENSATOR SPECTROSCOPIC ELLIPSOMETER SYSTEM, AND METHOD OF CALIBRATION
Title (de)
SPEKTROSKOPISCHES ELLIPSOMETERSYSTEM MIT EINEM DREHBAREN KOMPENSATOR MIT DISKRETEM POLARISATIONSZUSTAND UND KALIBRATIONSVERFAHREN
Title (fr)
ELLIPSOMÈTRE SPECTROSCOPIQUE ÉQUIPÉ D'UN COMPENSATEUR ROTATIF À ÉTATS DE POLARISATION DISCRETS, ET PROCÉDÉ D'ÉTALONNAGE
Publication
Application
Priority
US 2006026928 W 20060711
Abstract (en)
[origin: WO2008008058A1] Disclosed are spectroscopic ellipsometer, and combined spectroscopic reflectometer/ellipsometer systems. The spectroscopic ellipsometer system portion includes polarizer (P) and analyzer (A) elements which remain fixed in position during data acquisition, and a step-wise rotatable compensator (DSP) electromagnetic beam transmitting means, which serves to enable imposing a plurality of sequentially discrete, rather than continuously varying, polarization states on said beam of electromagnetic radiation. Further disclosed is an operation procedure for said spectroscopic ellipsometer system portion of the invention which involves the gathering of, for each of a plurality of ellipsometrically distinct sample systems, spectroscopic data at a sequential plurality of discrete electromagnetic radiation beam polarization states, combined with providing of a mathematical model of the spectroscopic ellipsometer system and application of a mathematical regression procedure.
IPC 8 full level
G01N 21/21 (2006.01)
CPC (source: EP)
G01N 21/211 (2013.01); G01N 21/274 (2013.01); G01N 2021/213 (2013.01)
Citation (search report)
- [XY] US 2005179897 A1 20050818 - SYNOWICKI RONALD A [US], et al
- [Y] US 6822738 B1 20041123 - JOHS BLAINE D [US], et al
- [XYI] K Y BANG ET AL: "Self-Calibrated Mueller Matrix Spectroscopic Ellipsometry", JOURNAL OF THE KOREAN PHYSICAL SOCIETY, vol. 45, no. 1, 1 July 2004 (2004-07-01), pages 185 - 188, XP055037644
- See references of WO 2008008058A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2008008058 A1 20080117; EP 2044404 A1 20090408; EP 2044404 A4 20121024; JP 2009543092 A 20091203
DOCDB simple family (application)
US 2006026928 W 20060711; EP 06786916 A 20060711; JP 2009519418 A 20060711