EP 2047507 A2 20090415 - SUBSTRATE CARRIER ENCLOSURE
Title (en)
SUBSTRATE CARRIER ENCLOSURE
Title (de)
SUBSTRATTRÄGERGEHÄUSE
Title (fr)
ENCEINTE DE SUPPORT DE SUBSTRAT
Publication
Application
Priority
- US 2007017360 W 20070803
- US 83558306 P 20060804
Abstract (en)
[origin: WO2008019076A2] There is provided a portable substrate carrier enclosure. The carrier enclosure has a carrier support; a displaceable cover; spacers between the support and cover; a gas inlet; and a removable lid. There is also provided an assembly and a process for depositing an air-sensitive material onto a substrate using the portable substrate carrier enclosure.
IPC 8 full level
H01L 21/673 (2006.01); H01L 21/00 (2006.01); H01L 21/677 (2006.01)
CPC (source: EP KR)
H01L 21/6723 (2013.01 - EP); H01L 21/6734 (2013.01 - EP); H05B 33/10 (2013.01 - KR)
Citation (search report)
See references of WO 2008019076A2
Designated contracting state (EPC)
DE FR GB
Designated extension state (EPC)
AL BA HR MK RS
DOCDB simple family (publication)
WO 2008019076 A2 20080214; WO 2008019076 A3 20080424; CN 101237027 A 20080806; CN 101237027 B 20110511; EP 2047507 A2 20090415; EP 2360722 A1 20110824; EP 2360722 B1 20121205; JP 2008159565 A 20080710; KR 101359150 B1 20140205; KR 20080012800 A 20080212; TW 200818374 A 20080416
DOCDB simple family (application)
US 2007017360 W 20070803; CN 200710182122 A 20070803; EP 07811062 A 20070803; EP 11004005 A 20070803; JP 2007204249 A 20070806; KR 20070078213 A 20070803; TW 96128686 A 20070803