EP 2049704 A1 20090422 - METHOD FOR DEPOSITING NON-OXIDE CERAMIC COATINGS
Title (en)
METHOD FOR DEPOSITING NON-OXIDE CERAMIC COATINGS
Title (de)
VERFAHREN ZUR ABSCHEIDUNG VON NICHTOXIDKERAMIKBESCHICHTUNGEN
Title (fr)
PROCEDE DE DEPOT DE REVETEMENTS CERAMIQUES NON OXYDES
Publication
Application
Priority
- EP 2007057463 W 20070719
- FR 0606660 A 20060721
Abstract (en)
[origin: WO2008009715A1] The invention relates to a method for depositing a non-oxide ceramic-type coating based on chrome carbides, nitrides or carbonitrides, by means of DLI-CVD carried out at a low temperature and atmospheric pressure on a metallic substrate, said method essentially comprising the following steps: a) a solution is prepared, containing a molecular compound which is a precursor of the metal to be deposited, belongs to the bis(arene) family, and has a decomposition temperature of between 300°C and 550°C, said compound being dissolved in a solvent which is depleted of oxygen atoms; b) said solution is introduced in the form of an aerosol into a heated evaporator (3) at a temperature between the boiling temperature of the solvent and the decomposition temperature of the precursor; and c) the precursor and the vapourised solvent are driven by a neutral gas flow from the evaporator (3) towards a CVD reactor (10) having cold walls and comprising a susceptor (13) carrying the substrate to be covered and heated to a temperature higher than the decomposition temperature of the precursor but to a maximum temperature of 550°C, the evaporator (3) and the CVD reactor (10) being subjected to the atmospheric pressure.
IPC 8 full level
C23C 16/32 (2006.01); C23C 16/34 (2006.01); C23C 16/36 (2006.01); C23C 16/448 (2006.01)
CPC (source: EP US)
C23C 16/32 (2013.01 - EP US); C23C 16/34 (2013.01 - EP US); C23C 16/36 (2013.01 - EP US); C23C 16/4486 (2013.01 - EP US)
Citation (search report)
See references of WO 2008009715A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA HR MK RS
DOCDB simple family (publication)
WO 2008009715 A1 20080124; WO 2008009715 A9 20090226; EP 2049704 A1 20090422; FR 2904007 A1 20080125; FR 2904007 B1 20081121; JP 2009544837 A 20091217; US 2010047449 A1 20100225; US 8343582 B2 20130101
DOCDB simple family (application)
EP 2007057463 W 20070719; EP 07787721 A 20070719; FR 0606660 A 20060721; JP 2009519984 A 20070719; US 37455507 A 20070719