EP 2050118 A1 20090422 - A MULTIPLE BEAM CHARGED PARTICLE OPTICAL SYSTEM
Title (en)
A MULTIPLE BEAM CHARGED PARTICLE OPTICAL SYSTEM
Title (de)
OPTISCHES SYSTEM MIT MEHREREN STRAHLEN GELADENER TEILCHEN
Title (fr)
SYSTÈME OPTIQUE À FAISCEAUX MULTIPLES DE PARTICULES CHARGÉES
Publication
Application
Priority
- NL 2007000180 W 20070713
- US 83339406 P 20060725
- NL 1032231 A 20060725
Abstract (en)
[origin: WO2008013442A1] The invention relates to a multiple beam charged particle optical system, comprising an electrostatic lens structure with at least one electrode, provided with apertures, wherein the effective size of a lens field effected by said electrode at a said aperture is made ultimately small. The system may comprise a diverging charged particle beam part, in which the lens structure is included. The physical dimension of the lens is made ultimately small, in particular smaller than one millimeter, more in particular less than a few tens of micrometers. In further elaboration, a lens is combined with a current limiting aperture (CLA), aligned such relative to a lens of said structure, that a virtual aperture (VA) effected by said current limiting aperture in said lens is situated in an optimum position with respect to minimizing aberrations total.
IPC 8 full level
H01J 37/063 (2006.01); H01J 37/12 (2006.01)
CPC (source: EP KR)
H01J 37/12 (2013.01 - EP KR); H01J 37/20 (2013.01 - KR); H01J 2237/0453 (2013.01 - EP KR); H01J 2237/04924 (2013.01 - EP KR); H01J 2237/1205 (2013.01 - EP KR); H01J 2237/121 (2013.01 - EP KR); H01J 2237/153 (2013.01 - EP KR); H01J 2237/26 (2013.01 - EP KR); H01J 2237/3175 (2013.01 - EP KR)
Citation (search report)
See references of WO 2008013442A1
Citation (examination)
- JP 2006049703 A 20060216 - CANON KK, et al
- JP 2003045789 A 20030214 - CANON KK
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA HR MK RS
DOCDB simple family (publication)
WO 2008013442 A1 20080131; CN 101496129 A 20090729; CN 101496129 B 20170623; EP 2050118 A1 20090422; EP 2405458 A1 20120111; EP 2405459 A1 20120111; JP 2009545118 A 20091217; JP 5340930 B2 20131113; KR 101464388 B1 20141121; KR 20090038023 A 20090417; TW 200823954 A 20080601; TW I412053 B 20131011
DOCDB simple family (application)
NL 2007000180 W 20070713; CN 200780028626 A 20070713; EP 07768909 A 20070713; EP 11183870 A 20070713; EP 11183872 A 20070713; JP 2009521713 A 20070713; KR 20097003925 A 20070713; TW 96127014 A 20070725