EP 2058100 A1 20090513 - Splitting method for brittle materials
Title (en)
Splitting method for brittle materials
Title (de)
Teilungsverfahren für spröde Materialien
Title (fr)
Procédé de fendage pour des matériaux cassants
Publication
Application
Priority
EP 07021572 A 20071106
Abstract (en)
A method for the splitting of a wafer from a body (1) of material capable of undergoing thermally induced fracture, characterized in that a source of cooling (4,15) is used to extract heat from the body (1) of material along a line or strip which progressively moves from one side of the body (1) to an opposite side thereof.
IPC 8 full level
CPC (source: EP)
B28D 1/221 (2013.01); B28D 5/0011 (2013.01)
Citation (search report)
- [A] DE 3403826 A1 19850808 - SIEMENS AG [DE]
- [A] EP 0729815 A1 19960904 - SHINETSU HANDOTAI KK [JP]
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA HR MK RS
DOCDB simple family (publication)
DOCDB simple family (application)
EP 07021572 A 20071106