EP 2067016 A1 20090610 - DEVICE FOR SCANNING A SAMPLE SURFACE COVERED WITH A LIQUID
Title (en)
DEVICE FOR SCANNING A SAMPLE SURFACE COVERED WITH A LIQUID
Title (de)
EINRICHTUNG ZUM ABTASTEN EINER VON EINER FLÜSSIGKEIT BEDECKTEN PROBENOBERFLÄCHE
Title (fr)
dispositif de palpage de la surface d'un échantillon recouverte par un LIQUIDE
Publication
Application
Priority
- EP 2007008036 W 20070914
- DE 102006043352 A 20060915
Abstract (en)
[origin: WO2008031618A1] Disclosed is a device (32) for scanning the surface of a sample (20) which is covered by a liquid (22). The device comprises a probe (12) which has, at one end, a tip (14), means (24) for moving the probe (12) and the sample (20) with respect to each other, a light source (26), a focussing apparatus (48) which focuses light from the light source (26) onto a location of the tip (14) in the liquid (22), and a detector (30) for detecting light which is scattered by the tip (14). A boundary surface (56) at which the light enters the liquid (22) is located on the light path between the light source (26) and the tip (14), wherein the boundary surface is positionally fixed with respect to the probe (12).
IPC 8 full level
G01Q 20/02 (2010.01); G01Q 30/14 (2010.01); G01Q 60/22 (2010.01); G01Q 60/44 (2010.01)
CPC (source: EP US)
B82Y 20/00 (2013.01 - US); B82Y 35/00 (2013.01 - US); G01Q 20/02 (2013.01 - EP US); G01Q 30/14 (2013.01 - EP US); G01Q 60/22 (2013.01 - EP US); G01Q 60/44 (2013.01 - EP US)
Citation (search report)
See references of WO 2008031618A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2008031618 A1 20080320; DE 102006043352 A1 20080327; EP 2067016 A1 20090610; US 2011162117 A1 20110630; US 8332960 B2 20121211
DOCDB simple family (application)
EP 2007008036 W 20070914; DE 102006043352 A 20060915; EP 07802320 A 20070914; US 44126707 A 20070914