EP 2068000 B1 20180815 - Vacuum pump mounting arrangement
Title (en)
Vacuum pump mounting arrangement
Title (de)
Anordnung mit Vakuumpumpe
Title (fr)
Arrangement de montage d'une pompe à vide
Publication
Application
Priority
DE 102007059257 A 20071208
Abstract (en)
[origin: EP2068000A2] The arrangement has a fast moving rotor (2) and a stator (3), a vacuum chamber (4) with a chamber flange (5) and an intermediate component (6) i.e. vacuum gate valve, provided between a vacuum pump (1) and the vacuum chamber. The vacuum chamber, the vacuum pump and the intermediate component are removably connected with each other. The vacuum pump is arranged at a connection unit (7) i.e. support, which is connected with the chamber flange in a secure crash moment manner. The support is arranged between the vacuum pump and the intermediate component.
IPC 8 full level
F04D 19/04 (2006.01); F04D 27/00 (2006.01); F04D 29/60 (2006.01); F04D 29/64 (2006.01)
CPC (source: EP)
F04D 19/042 (2013.01); F04D 27/0292 (2013.01); F04D 29/601 (2013.01); F04D 29/644 (2013.01)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
DOCDB simple family (publication)
EP 2068000 A2 20090610; EP 2068000 A3 20140122; EP 2068000 B1 20180815; DE 102007059257 A1 20090610; JP 2009138740 A 20090625; JP 5467758 B2 20140409
DOCDB simple family (application)
EP 08020361 A 20081122; DE 102007059257 A 20071208; JP 2008299180 A 20081125