EP 2073243 B1 20181003 - Linear electron source, evaporator using linear electron source, and applications of electron sources
Title (en)
Linear electron source, evaporator using linear electron source, and applications of electron sources
Title (de)
Lineare Elektronenquelle sowie Elektronenstrahlverdampfer mit linearer Elektronenquelle und deren Anwendungen
Title (fr)
Source d'électron linéaire, évaporateur utilisant la source d'électron linéaire, et application des sources d'électron
Publication
Application
Priority
EP 07024958 A 20071221
Abstract (en)
[origin: EP2073243A1] A linear plasma electron source (100) is provided. The linear plasma electron source includes a housing (112) acting as a first electrode, the housing having side walls (312), a slit opening (114) in the housing for trespassing of a electron beam, the slit opening defining a length direction of the source, a second electrode (110) being arranged within the housing and having a first side (413) facing the slit opening, the first side being spaced from the slit opening by a first distance, wherein the length of the electron source in the length direction is at least 5 times the first distance, and at least one gas supply (70) for providing a gas into the housing.
IPC 8 full level
B32B 37/00 (2006.01); C23C 14/30 (2006.01); G21K 5/04 (2006.01); H01J 1/32 (2006.01); H01J 3/02 (2006.01); H01J 37/077 (2006.01); H01J 37/305 (2006.01)
CPC (source: EP US)
H01J 3/025 (2013.01 - EP US); H01J 37/077 (2013.01 - EP US); H01J 37/3053 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
EP 2073243 A1 20090624; EP 2073243 B1 20181003; TW 200931474 A 20090716; TW I390574 B 20130321; US 2009159811 A1 20090625; US 8294115 B2 20121023; WO 2009080411 A1 20090702
DOCDB simple family (application)
EP 07024958 A 20071221; EP 2008065703 W 20081117; TW 97144362 A 20081117; US 27247708 A 20081117