EP 2080215 A1 20090722 - DEVICE AND METHOD FOR LOCALLY PRODUCING MICROWAVE PLASMA
Title (en)
DEVICE AND METHOD FOR LOCALLY PRODUCING MICROWAVE PLASMA
Title (de)
VORRICHTUNG UND VERFAHREN ZUR LOKALEN ERZEUGUNG VON MIKROWELLENPLASMEN
Title (fr)
DISPOSITIF ET PROCEDE DE PRODUCTION LOCALE DE PLASMAS DE MICRO-ONDES
Publication
Application
Priority
- EP 2007008840 W 20071011
- DE 102006048816 A 20061016
Abstract (en)
[origin: CA2666131A1] The invention relates to a device for locally producing microwave plasma. Said device comprises at least one microwave supply that is surrounded by a t least one dielectric tube (1). At least one of the dielectric tubes, prefe rably the outer dielectric tube, is partially surrounded by metal cladding ( 2). A locally delimited plasma is produced by means of the above-mentioned d evice by shielding microwaves.
IPC 8 full level
H01J 37/32 (2006.01)
CPC (source: EP US)
H01J 37/32192 (2013.01 - EP US); H01J 37/3222 (2013.01 - EP US); H01J 37/32366 (2013.01 - EP US)
Citation (search report)
See references of WO 2008046553A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
DE 102006048816 A1 20080417; AU 2007312620 A1 20080424; CA 2666131 A1 20080424; EP 2080215 A1 20090722; US 2010116790 A1 20100513; WO 2008046553 A1 20080424
DOCDB simple family (application)
DE 102006048816 A 20061016; AU 2007312620 A 20071011; CA 2666131 A 20071011; EP 07818911 A 20071011; EP 2007008840 W 20071011; US 31188107 A 20071011