EP 2092350 A2 20090826 - MEASURING DEVICE AND MEASURING METHOD FOR INSPECTING THE SURFACE OF A SUBSTRATE
Title (en)
MEASURING DEVICE AND MEASURING METHOD FOR INSPECTING THE SURFACE OF A SUBSTRATE
Title (de)
MESSVORRICHTUNG UND MESSVERFAHREN ZUM INSPIZIEREN EINER OBERFLÄCHE EINES SUBSTRATES
Title (fr)
DISPOSITIF ET PROCÉDÉ DE MESURE POUR INSPECTER UNE SURFACE D'UN SUBSTRAT
Publication
Application
Priority
- EP 2007061936 W 20071106
- DE 102006054088 A 20061116
Abstract (en)
[origin: WO2008058869A2] The invention relates to a measuring device (100) for inspecting the surface (141) of a substrate (140). The measuring device (100) has a retaining element (110) and an air-mounted element (120, 220), which is fixed to the retaining element (110), the air-mounted element being designed in such a way that an air bearing can be formed together with the surface (141) of the substrate (140) to be inspected and having an elasticity that enables the air-mounted element (120, 220) to be adapted to any irregularities in the surface (141). The measuring device (100) also has at least one sensor (130, 230), which is fixed to the air-mounted element (120, 220) and which is configured to record the surface (141) of the substrate (140). As a result of the flexibility of the air-mounted element (120, 220), the sensor or sensors (130, 230) can be displaced at a constant measuring distance from the surface (141) to be inspected even if said surface (141) undulates. The invention also relates to a measuring method for inspecting surfaces, according to which the measuring device (100) is displaced in relation to the surface (141).
IPC 8 full level
G01R 1/07 (2006.01); G01R 31/302 (2006.01); G09G 3/00 (2006.01)
CPC (source: EP KR)
G01R 1/07 (2013.01 - EP); G01R 27/26 (2013.01 - KR); G01R 31/302 (2013.01 - EP); G01R 31/304 (2013.01 - KR); G01R 31/2812 (2013.01 - EP)
Citation (search report)
See references of WO 2008058869A2
Citation (examination)
- WO 2007036461 A1 20070405 - SIEMENS AG [DE], et al
- US 4824248 A 19890425 - NEUMANN CATHARINE G [US]
- US 2005015170 A1 20050120 - ADIN RAANAN [IL], et al
- WO 2006093349 A1 20060908 - OHT INC [JP], et al
- US 2002132383 A1 20020919 - HIROKI MASAAKI [JP], et al
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
DE 102006054088 A1 20080521; CN 101432628 A 20090513; CN 101432628 B 20121003; EP 2092350 A2 20090826; JP 2009535632 A 20091001; JP 4922396 B2 20120425; KR 101014121 B1 20110214; KR 20090016449 A 20090213; WO 2008058869 A2 20080522; WO 2008058869 A3 20080724
DOCDB simple family (application)
DE 102006054088 A 20061116; CN 200780015618 A 20071106; EP 07822253 A 20071106; EP 2007061936 W 20071106; JP 2009508395 A 20071106; KR 20087026796 A 20071106