EP 2094603 A1 20090902 - METHOD FOR FORMING NON-ALIGNED MICROCAVITIES OF DIFFERENT DEPTHS
Title (en)
METHOD FOR FORMING NON-ALIGNED MICROCAVITIES OF DIFFERENT DEPTHS
Title (de)
VERFAHREN ZUR HERSTELLUNG VON NICHT AUSGERICHTETEN MIKROHOHLRÄUMEN MIT VERSCHIEDENER TIEFE
Title (fr)
PROCEDE DE REALISATION DE MICRO-CAVITES NON-ALIGNEES ET A DIFFERENTES PROFONDEURS
Publication
Application
Priority
- EP 2007064324 W 20071220
- FR 0655817 A 20061221
Abstract (en)
[origin: WO2008074861A1] The invention relates to a method for forming microcavities (118) of different depths in a layer (102) based on at least an amorphous or monocrystalline material, comprising at least the following steps in which: at least one shaft and/or trench is formed in the layer (102) so as to extend through one face (101) thereof, such that two sections of the shaft and/or the trench, in two different planes parallel to the face (101), are aligned in relation to one another along an alignment axis forming a non-zero angle with a normal to the plane of said face (101); and the layer (102) is annealed in a hydrogenated atmosphere so as to transform the shaft and/or trench into at least two microcavities (118).
IPC 8 full level
CPC (source: EP US)
B81C 1/00047 (2013.01 - EP US); B01L 3/5027 (2013.01 - EP US); B81B 2201/058 (2013.01 - EP US); B81B 2203/0384 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
FR 2910455 A1 20080627; FR 2910455 B1 20090403; EP 2094603 A1 20090902; US 2010230674 A1 20100916; US 8236698 B2 20120807; WO 2008074861 A1 20080626
DOCDB simple family (application)
FR 0655817 A 20061221; EP 07857945 A 20071220; EP 2007064324 W 20071220; US 51935607 A 20071220