EP 2097553 A1 20090909 - METHOD AND DEVICE FOR COATING SUBSTRATES
Title (en)
METHOD AND DEVICE FOR COATING SUBSTRATES
Title (de)
VERFAHREN UND VORRICHTUNG ZUM BESCHICHTEN VON SUBSTRATEN
Title (fr)
PROCÉDÉ ET DISPOSITIF DE REVÊTEMENT DE SUBSTRATS
Publication
Application
Priority
- EP 2007009862 W 20071115
- DE 102006057386 A 20061204
Abstract (en)
[origin: DE102006057386A1] Method for coating a substrate with a catalytically active material comprises charging a vacuum chamber with a substrate, closing and evacuating the chamber, cleaning the substrate by introducing a gaseous reducing agent, enlarging the substrate surface by depositing a vapor-like component on the substrate surface, coating the surface of the substrate with one or more metals or their oxides, flooding the chamber and removing the substrate. An independent claim is also included for a device for coating a substrate.
IPC 8 full level
C23C 14/02 (2006.01); C23C 14/56 (2006.01)
CPC (source: EP KR US)
C23C 14/02 (2013.01 - KR); C23C 14/024 (2013.01 - EP US); C23C 14/22 (2013.01 - KR); C23C 14/56 (2013.01 - KR); C23C 14/566 (2013.01 - EP US)
Citation (search report)
See references of WO 2008067899A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
DE 102006057386 A1 20080605; BR PI0719712 A2 20140218; CA 2671173 A1 20080612; CN 101553593 A 20091007; EP 2097553 A1 20090909; JP 2010511787 A 20100415; KR 20090084920 A 20090805; RU 2009125585 A 20110120; RU 2468120 C2 20121127; US 2010092692 A1 20100415; WO 2008067899 A1 20080612
DOCDB simple family (application)
DE 102006057386 A 20061204; BR PI0719712 A 20071115; CA 2671173 A 20071115; CN 200780044859 A 20071115; EP 07846592 A 20071115; EP 2007009862 W 20071115; JP 2009539629 A 20071115; KR 20097011448 A 20071115; RU 2009125585 A 20071115; US 31299907 A 20071115