EP 2097790 A2 20090909 - SUBSTRATE PROCESSING APPARATUS AND METHOD
Title (en)
SUBSTRATE PROCESSING APPARATUS AND METHOD
Title (de)
VORRICHTUNG UND VERFAHREN ZUR SUBSTRATVERARBEITUNG
Title (fr)
APPAREIL ET PROCEDE DE TRAITEMENT DE SUBSTRAT
Publication
Application
Priority
- US 2007087953 W 20071218
- US 87052806 P 20061218
- US 67089607 A 20070202
- US 94866707 P 20070709
Abstract (en)
[origin: WO2008077048A2] Substrate processing methods and apparatus are disclosed. In some embodiments a substrate processing apparatus may comprise a support structure and a moveable stage including first and second stages. The moveable stage has one or more maglev units attached to the first stage and/or second stage proximate an edge of the first stage. The first stage retains one or more substrates and moves with respect to a first axis that is substantially fixed with respect to the second stage. The second stage translates along a second axis with respect to the support structure. In other embodiments, a primary motor may maintain a rotary stage at an angular speed and/or accelerate or decelerate the stage from a first angular speed to a second angular speed. A secondary motor may accelerate the stage from rest to the first angular speed and/or decelerate the stage from a non-zero angular speed.
IPC 8 full level
G03F 7/20 (2006.01); F16C 39/06 (2006.01); G01N 21/95 (2006.01); H01L 21/68 (2006.01)
CPC (source: EP)
F16C 32/044 (2013.01); G01N 21/9501 (2013.01); G03F 7/704 (2013.01); G03F 7/70733 (2013.01); G03F 7/70775 (2013.01); G03F 7/70816 (2013.01); H01L 21/67265 (2013.01); H01L 21/68714 (2013.01); H01L 21/68771 (2013.01)
Citation (search report)
See references of WO 2008077048A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2008077048 A2 20080626; WO 2008077048 A3 20081204; EP 2097790 A2 20090909; JP 2010514167 A 20100430; JP 2014042048 A 20140306; JP 2015111714 A 20150618; JP 5453104 B2 20140326
DOCDB simple family (application)
US 2007087953 W 20071218; EP 07869445 A 20071218; JP 2009541643 A 20071218; JP 2013212848 A 20131010; JP 2015015084 A 20150129