EP 2102898 A2 20090923 - REEL-TO-REEL REACTION OF PRECURSOR FILM TO FORM SOLAR CELL ABSORBER
Title (en)
REEL-TO-REEL REACTION OF PRECURSOR FILM TO FORM SOLAR CELL ABSORBER
Title (de)
REEL-TO-REEL-REAKTION EINER VORLÄUFERFOLIE ZUR FORMUNG EINER SOLARZELLENABSORPTIONSSCHICHT
Title (fr)
RÉACTION INTER-BOBINE D'UN FILM PRÉCURSEUR POUR FORMATION D'UN ABSORBEUR SOLAIRE
Publication
Application
Priority
- US 2007084432 W 20071112
- US 86538506 P 20061110
Abstract (en)
[origin: WO2008085604A2] A roll-to-roll rapid thermal processing (RTP) tool with multiple chambers for forming a solar cell absorber by reacting a precursor layer on a continuous flexible workpiece. The RTP tool includes an elongated housing having a heating chamber with a predetermined temperature profile, a supply chamber and a receiving chamber. The heating chamber includes a small process gap in which the precursor layer is reacted with a Group VIA material to form an absorber layer. The continuous flexible workpiece is unrolled and advanced from the supply chamber into the heating chamber, and the processed continuous flexible workpiece is taken up and rolled in the receiving chamber.
IPC 8 full level
H01L 21/00 (2006.01); H01L 31/18 (2006.01); H01L 31/04 (2014.01)
CPC (source: EP KR)
H01L 21/67109 (2013.01 - EP); H01L 31/0322 (2013.01 - EP); H01L 31/0324 (2013.01 - EP); H01L 31/04 (2013.01 - KR); H01L 31/18 (2013.01 - KR); H01L 31/1844 (2013.01 - EP); Y02E 10/541 (2013.01 - EP); Y02E 10/544 (2013.01 - EP)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2008085604 A2 20080717; WO 2008085604 A3 20081016; WO 2008085604 B1 20081224; CN 101578707 A 20091111; CN 101578707 B 20120822; EP 2102898 A2 20090923; EP 2102898 A4 20110629; JP 2010509779 A 20100325; KR 20090110293 A 20091021; TW 200832726 A 20080801
DOCDB simple family (application)
US 2007084432 W 20071112; CN 200780046459 A 20071112; EP 07872342 A 20071112; JP 2009536531 A 20071112; KR 20097012027 A 20071112; TW 96142734 A 20071112