EP 2104752 A2 20090930 - METHOD FOR STABILIZING AND FUNCTIONALIZING POROUS METALLIC LAYERS
Title (en)
METHOD FOR STABILIZING AND FUNCTIONALIZING POROUS METALLIC LAYERS
Title (de)
VERFAHREN ZUR STABILISIERUNG UND FUNKTIONALISIERUNG VON PORÖSEN METALLISCHEN SCHICHTEN
Title (fr)
PROCÉDÉ DE STABILISATION ET DE FONCTIONNALISATION DE COUCHES MÉTALLIQUES POREUSES
Publication
Application
Priority
- EP 2007060865 W 20071012
- DE 102006048906 A 20061017
Abstract (en)
[origin: WO2008046785A2] The invention relates to a method for stabilizing and functionalizing a porous metallic layer (1), wherein the porous metallic layer (1) comprises a metallic matrix (3) with pores (5) therein. In a first step, ceramic material (7) or precursors of ceramic material (7) is introduced into the pores (5) of the metallic matrix (3). In a second step, the precursors of the ceramic material are converted into the ceramic material (7), if applicable. Subsequently, a thermal or chemical post-treatment of the porous metallic layer takes place. The invention further relates to a porous metallic structure, particularly for gate electrodes of semiconductor transistors, comprising pores (5) in a metallic matrix (3). The pores (5) of the metallic matrix (3) comprise ceramic material.
IPC 8 full level
C23C 18/12 (2006.01); C04B 35/00 (2006.01); C23C 24/00 (2006.01); H01L 21/288 (2006.01)
CPC (source: EP)
C23C 18/1208 (2013.01); C23C 18/1241 (2013.01); C23C 18/1254 (2013.01); C23C 18/1295 (2013.01); C23C 24/00 (2013.01); C23C 26/00 (2013.01); G01N 27/414 (2013.01)
Citation (search report)
See references of WO 2008046785A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2008046785 A2 20080424; WO 2008046785 A3 20090507; CN 101535526 A 20090916; DE 102006048906 A1 20080430; EP 2104752 A2 20090930; JP 2010507018 A 20100304
DOCDB simple family (application)
EP 2007060865 W 20071012; CN 200780038868 A 20071012; DE 102006048906 A 20061017; EP 07821232 A 20071012; JP 2009532777 A 20071012