EP 2109133 A4 20111228 - STAGE APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
Title (en)
STAGE APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
Title (de)
BÜHNENVORRICHTUNG, BELICHTUNGSVORRICHTUNG UND BAUELEMENTEHERSTELLUNGSVERFAHREN
Title (fr)
APPAREIL DE PLATEAU, APPAREIL D'EXPOSITION ET PROCÉDÉ DE FABRICATION DE L'APPAREIL
Publication
Application
Priority
- JP 2007074673 W 20071221
- JP 2006351479 A 20061227
Abstract (en)
[origin: EP2109133A1] The invention provides a stage apparatus that has a fixed part (16), which has a prescribed movement surface (16a), and a first movable body, which is capable of moving along the movement surface (16a) in a plurality of directions that includes a first direction. The stage apparatus comprises: a substage (61A, 61B) that, in synchrony with the movement of the first movable body, moves in the first direction with respect to the movement surface (16a); a first measuring apparatus (67), at least part of which is provided to the substage (61 A, 61 B), that detects information related to the relative position between the substage (61 A, 6 1 B) and the movement surface (16a) in the first direction; and a second measuring apparatus (71, 72), at least part of which is provided to the substage (61A, 61B), that detects information related to the relative position between the substage (61A, 61B) and the first movable body in a second direction, which are substantially orthogonal to the first direction and follow along the movement surface (16a).
IPC 8 full level
G03F 7/20 (2006.01); H01L 21/027 (2006.01); H01L 21/68 (2006.01)
CPC (source: EP KR US)
G03F 7/70691 (2013.01 - EP US); G03F 7/70716 (2013.01 - EP KR US); G03F 7/70725 (2013.01 - KR); G03F 7/70758 (2013.01 - EP KR US); G03F 7/70775 (2013.01 - EP KR US); G03F 7/70808 (2013.01 - EP US); G03F 7/7085 (2013.01 - KR); G03F 7/709 (2013.01 - EP US); H01L 21/677 (2013.01 - KR); H01L 21/682 (2013.01 - EP KR US)
Citation (search report)
- [XI] US 6437463 B1 20020820 - HAZELTON ANDREW J [US], et al
- [X] EP 1257045 A2 20021113 - NIPPON THOMPSON CO LTD [JP]
- See references of WO 2008078688A1
Citation (examination)
US 2005024621 A1 20050203 - KORENAGA NOBUSHIGE [JP]
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
DOCDB simple family (publication)
EP 2109133 A1 20091014; EP 2109133 A4 20111228; EP 2998983 A2 20160323; EP 2998983 A3 20160608; EP 2998983 B1 20180321; HK 1218185 A1 20170203; JP 5146323 B2 20130220; JP WO2008078688 A1 20100422; KR 20090106555 A 20091009; KR 20150036734 A 20150407; TW 200845118 A 20081116; TW I457978 B 20141021; US 2010066992 A1 20100318; WO 2008078688 A1 20080703
DOCDB simple family (application)
EP 07859953 A 20071221; EP 15192315 A 20071221; HK 16106134 A 20160531; JP 2007074673 W 20071221; JP 2008551084 A 20071221; KR 20097015661 A 20071221; KR 20157004515 A 20071221; TW 96150216 A 20071226; US 45791409 A 20090625