EP 2109693 A1 20091021 - A HYDROGENATED AMORPHOUS CARBON COATING
Title (en)
A HYDROGENATED AMORPHOUS CARBON COATING
Title (de)
BESCHICHTUNG AUS HYDRIERTEM AMORPHEN KOHLENSTOFF
Title (fr)
REVÊTEMENT DE CARBONE AMORPHE HYDROGÉNÉ
Publication
Application
Priority
- EP 2008051388 W 20080205
- EP 07101781 A 20070206
- EP 08708689 A 20080205
Abstract (en)
[origin: WO2008095920A1] The invention relates to a hydrogenated amorphous carbon coating characterized by a substantial absence of sp<SUP>x</SUP> hybridized CH <SUB>x</SUB> endgroups with x equal to 1, 2 and 3. The invention further relates to a method to deposit such a hydrogenated amorphous carbon coatingon a substrate.
IPC 8 full level
C23C 16/26 (2006.01)
CPC (source: EP US)
C23C 16/26 (2013.01 - EP US)
Citation (search report)
See references of WO 2008095920A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2008095920 A1 20080814; CN 101663416 A 20100303; EP 2109693 A1 20091021; US 2010119732 A1 20100513
DOCDB simple family (application)
EP 2008051388 W 20080205; CN 200880004149 A 20080205; EP 08708689 A 20080205; US 52479308 A 20080205