EP 2110881 B1 20180822 - MEMS-based radio frequency circulator
Title (en)
MEMS-based radio frequency circulator
Title (de)
Richtungsgabel auf der Basis von Speichern
Title (fr)
Circulateur radiofréquence a base de mems
Publication
Application
Priority
FR 0802175 A 20080418
Abstract (en)
[origin: EP2110881A1] The circulator has condenser type electrostatic-actuation micro switches (MEMS1, MEMS2) formed on a substrate, and an antenna port (p2) and an outlet port (p3) that are arranged on a discontinuous radio frequency signal line (Ls). An inlet port (p1) is located on a continuous radiofrequency signal line (Lp). The switch (MEMS1) connects the signal lines by self-actuating membrane under an effect of input signal power. The switches are separated by a distance of an order of one quarter of length of wave corresponding to a frequency of the signal. The lines have an insulating material e.g. lead zirconate titanate, zirconium oxide silicon nitride, upper layer.
IPC 8 full level
H01P 1/387 (2006.01); H01P 1/12 (2006.01); H01P 1/38 (2006.01)
CPC (source: EP US)
H01P 1/127 (2013.01 - EP US); H01P 1/387 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR
DOCDB simple family (publication)
EP 2110881 A1 20091021; EP 2110881 B1 20180822; FR 2930374 A1 20091023; FR 2930374 B1 20110826; US 2009286491 A1 20091119; US 8155602 B2 20120410
DOCDB simple family (application)
EP 09157873 A 20090414; FR 0802175 A 20080418; US 42507009 A 20090416