EP 2132522 A2 20091216 - OPTICAL METROLOGY SYSTEM
Title (en)
OPTICAL METROLOGY SYSTEM
Title (de)
OPTISCHES METROLOGIESYSTEM
Title (fr)
SYSTEME DE METROLOGIE OPTIQUE
Publication
Application
Priority
- FR 2008050178 W 20080205
- FR 0753748 A 20070309
Abstract (en)
[origin: WO2008110721A2] The invention relates to a device for positioning an object relative to a reference position, characterised in that it comprises a laser (1) associated with an acoustic-optical modulator (3) for transmitting at least two parallel and modulated phase-opposed laser beams, said beams being focused on a slot (F) connected to the object to be positioned (OBJ), the larger side of the slot (F) being perpendicular to the positioning direction, and a photodiode (13) adapted for collecting the beams from the slot (F) and associated with a synchronous detection amplifier (9) for supplying a signal indicative of the slot (F) position relative to the reference position.
IPC 8 full level
G01B 11/02 (2006.01); G01D 5/34 (2006.01)
CPC (source: EP KR US)
G01B 11/02 (2013.01 - EP KR US); G01D 5/34 (2013.01 - KR); G01D 5/342 (2013.01 - EP US)
Citation (search report)
See references of WO 2008110721A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
DOCDB simple family (publication)
FR 2913492 A1 20080912; FR 2913492 B1 20090424; AU 2008224807 A1 20080918; CA 2680015 A1 20080918; EP 2132522 A2 20091216; JP 2010520994 A 20100617; KR 20090122239 A 20091126; US 2010149552 A1 20100617; WO 2008110721 A2 20080918; WO 2008110721 A3 20081127
DOCDB simple family (application)
FR 0753748 A 20070309; AU 2008224807 A 20080205; CA 2680015 A 20080205; EP 08762037 A 20080205; FR 2008050178 W 20080205; JP 2009552250 A 20080205; KR 20097019327 A 20080205; US 53025808 A 20080205