EP 2136388 A2 20091223 - Deposition of Materials
Title (en)
Deposition of Materials
Title (de)
Ablage von Materialien
Title (fr)
Dépôt de matériaux
Publication
Application
Priority
GB 0811382 A 20080620
Abstract (en)
Sputter deposition can move towards a more commercial scale, by adopting a geometry that is more susceptible to larger scale operation and also by encouraging the production of the necessary charged nanoparticles. The former is assisted by a magnetron comprising a cylindrical target having at least an outer face of the material to be deposited and a hollow interior, and a source of magnetic flux within the hollow interior arranged to present magnetic poles in a direction that is radially outward with respect to the cylindrical target. The source of magnetic flux preferably presents alternating north and south magnetic poles in circumferential bands around the target. The latter is enabled by providing a plasma or electron cloud in the flight path at a later stage where atoms are more likely to have coalesced into nanoparticles. Magnets are able to extend the physical extent of the sputter plasma, allowing electron capture by the nanoparticles that have been generated by the plasma. Accordingly, an apparatus for the production of nanoparticles is disclosed comprising a magnetron within a chamber containing a gas at low pressure, a means for creating a flow of the gas away from the magnetron, and at least one source of magnetic flux located downstream from the magnetron.
IPC 8 full level
H01J 37/34 (2006.01)
CPC (source: EP GB)
C23C 14/35 (2013.01 - GB); H01J 37/3405 (2013.01 - EP GB); H01J 37/3452 (2013.01 - EP GB); H01J 37/3458 (2013.01 - EP GB)
Citation (applicant)
- GB 2430202 A 20070321 - MANTIS DEPOSITION LTD [GB]
- US 2008110747 A1 20080515 - DING PEIJUN [US], et al
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR
DOCDB simple family (publication)
EP 2136388 A2 20091223; EP 2136388 A3 20110330; GB 0811382 D0 20080730; GB 2461094 A 20091223; GB 2461094 B 20120822
DOCDB simple family (application)
EP 09008048 A 20090619; GB 0811382 A 20080620