EP 2140226 A2 20100106 - NANOROBOT MODULE AUTOMATION AND EXCHANGE
Title (en)
NANOROBOT MODULE AUTOMATION AND EXCHANGE
Title (de)
NANOROBOTIK-MODUL, AUTOMATISIERUNG UND WECHSEL
Title (fr)
MODULE NANOROBOTIQUE, AUTOMATISATION ET REMPLACEMENT
Publication
Application
Priority
- DE 2008000699 W 20080424
- DE 102007019623 A 20070424
- DE 102007022045 A 20070508
- DE 102007035761 A 20070727
- DE 102007035950 A 20070730
- DE 102007036019 A 20070730
Abstract (en)
[origin: WO2008128532A2] The invention relates to a nanorobot module with a measuring device for measuring spatial surface properties with a measuring in the centimetre range and a resolution in the nanometre range which can be arranged in a vacuum chamber, for example, the vacuum chamber of a microscope. In addition to the integration of the nanorobot module in a vacuum chamber, the invention further relates to the automation of the module in the chamber system, in particular, the connection of the control of the nanorobot system and chamber system by providing an interface between both systems. The invention also relates to a mechatronic exchange adapter for the flexible fixing of nanorobot modules within a vacuum chamber, in particular an exchange adapter which preferably connects a nanorobot module in a working stage and mechanically locates the same with high precision without play.
IPC 1-7
IPC 8 full level
G01B 21/20 (2006.01); B21J 19/00 (2006.01); B25J 15/00 (2006.01); G01B 21/04 (2006.01); G01Q 10/02 (2010.01); G01Q 10/04 (2010.01); G01Q 30/04 (2010.01); G01Q 30/16 (2010.01); G01Q 30/20 (2010.01); H01J 37/26 (2006.01)
CPC (source: EP KR US)
B82B 1/00 (2013.01 - KR); G01B 21/04 (2013.01 - EP US); G01B 21/20 (2013.01 - KR); G01Q 10/02 (2013.01 - EP US); G01Q 10/04 (2013.01 - EP US); G01Q 30/04 (2013.01 - EP US); G01Q 30/08 (2013.01 - KR); G01Q 30/16 (2013.01 - EP US); G01Q 30/20 (2013.01 - EP US); H01J 37/20 (2013.01 - EP US); H01J 37/26 (2013.01 - KR); H01J 2237/202 (2013.01 - EP US); H01J 2237/2025 (2013.01 - EP US); H01J 2237/20264 (2013.01 - EP US); H01J 2237/20278 (2013.01 - EP US); H01J 2237/20292 (2013.01 - EP US); H01J 2237/204 (2013.01 - EP US); H01J 2237/28 (2013.01 - EP US)
Citation (search report)
See references of WO 2008128532A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2008128532 A2 20081030; WO 2008128532 A3 20090205; DE 112008001080 A5 20100128; EP 2140226 A2 20100106; KR 20100021413 A 20100224; US 2010140473 A1 20100610
DOCDB simple family (application)
DE 2008000699 W 20080424; DE 112008001080 T 20080424; EP 08757972 A 20080424; KR 20097023806 A 20080424; US 59670708 A 20080424