Global Patent Index - EP 2145696 A1

EP 2145696 A1 20100120 - Capacitive micromachined ultrasonic transducer and its fabrication method

Title (en)

Capacitive micromachined ultrasonic transducer and its fabrication method

Title (de)

Kapazitiver mikrogefertigter Ultraschallwandler und Verfahren zu seiner Herstellung

Title (fr)

Transducteur ultrasonique capacitif micro-usiné et procédé de fabrication correspondant

Publication

EP 2145696 A1 20100120 (EN)

Application

EP 08160405 A 20080715

Priority

EP 08160405 A 20080715

Abstract (en)

The invention relates to an electro-acoustic transducer (8) comprising a substrate (1) of a substrate material, a cavity (3) and a membrane (5) extending over at least a portion of the cavity. The cavity is arranged in the substrate material and the membrane is supported above the cavity by the substrate material. The invention further relates to a method of fabrication such an electro-acoustic transducer.

IPC 8 full level

B06B 1/02 (2006.01)

CPC (source: EP)

B06B 1/0292 (2013.01)

Citation (applicant)

Citation (search report)

  • [XY] EP 1722595 A1 20061115 - MATSUSHITA ELECTRIC IND CO LTD [JP]
  • [X] FR 2897051 A1 20070810 - GEN ELECTRIC [US]
  • [Y] US 5801069 A 19980901 - HARADA KENICHI [JP], et al
  • [X] CALIANO ET AL: "A silicon microfabricated electrostatic transducer: 1 MHz transmission in air and in water", MICROELECTRONIC ENGINEERING, ELSEVIER PUBLISHERS BV., AMSTERDAM, NL, vol. 53, no. 1-4, 1 June 2000 (2000-06-01), pages 573 - 576, XP022553248, ISSN: 0167-9317

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR

Designated extension state (EPC)

AL BA MK RS

DOCDB simple family (publication)

EP 2145696 A1 20100120

DOCDB simple family (application)

EP 08160405 A 20080715