EP 2153070 A1 20100217 - TURBOMOLECULAR PUMP
Title (en)
TURBOMOLECULAR PUMP
Title (de)
TURBOMOLEKULARPUMPE
Title (fr)
POMPE TURBOMOLÉCULAIRE
Publication
Application
Priority
- EP 2008056991 W 20080605
- DE 102007027354 A 20070611
Abstract (en)
[origin: WO2008151979A1] The invention relates to a turbomolecular pump (12) with a circular suction opening (16) distal from an inlet rotor stage (18). The suction opening (16) has at least two opening sections (41,42,43) separated from each other.
IPC 8 full level
F04D 19/04 (2006.01); F04D 29/70 (2006.01); H01J 49/26 (2006.01)
CPC (source: EP US)
F04D 19/042 (2013.01 - EP US); F04D 29/70 (2013.01 - EP US)
Citation (search report)
See references of WO 2008151979A1
Citation (examination)
EP 1992822 A1 20081119 - AGILENT TECHNOLOGIES INC [US]
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA MK RS
DOCDB simple family (publication)
DE 102007027354 A1 20081218; CN 101680458 A 20100324; EP 2153070 A1 20100217; JP 2010529359 A 20100826; US 2010187415 A1 20100729; WO 2008151979 A1 20081218
DOCDB simple family (application)
DE 102007027354 A 20070611; CN 200880019895 A 20080605; EP 08760568 A 20080605; EP 2008056991 W 20080605; JP 2010511586 A 20080605; US 66395608 A 20080605