EP 2155922 A1 20100224 - PROCESS FOR PRODUCING TITANIUM OXIDE LAYERS
Title (en)
PROCESS FOR PRODUCING TITANIUM OXIDE LAYERS
Title (de)
VERFAHREN ZUR HERSTELLUNG VON TITANOXIDSCHICHTEN
Title (fr)
PROCÉDÉ DE PRODUCTION DE COUCHES D'OXYDE DE TITANE
Publication
Application
Priority
- EP 2008004339 W 20080530
- DE 102007025577 A 20070601
Abstract (en)
[origin: WO2008145397A1] The present invention relates to a process for the vacuum-based deposition of a titanium oxide layer from the gas phase on a substrate, wherein deposition is carried out from a source containing titanium oxide at a deposition rate of less than 25 nm/s in an oxygen-containing atmosphere and at a substrate temperature of less than 500°C and, after deposition, the coated substrate is heat treated for a period of at least 30 minutes in an oxygen-containing atmosphere at temperatures in the range from 200°C to 1000°C.
IPC 8 full level
C23C 14/08 (2006.01); B01J 35/00 (2024.01); C23C 14/58 (2006.01)
CPC (source: EP US)
C23C 14/083 (2013.01 - EP US); C23C 14/5806 (2013.01 - EP US); C23C 14/5853 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA MK RS
DOCDB simple family (publication)
DE 102007025577 A1 20081204; DE 102007025577 B4 20110825; EP 2155922 A1 20100224; JP 2010529290 A 20100826; US 2010240531 A1 20100923; WO 2008145397 A1 20081204
DOCDB simple family (application)
DE 102007025577 A 20070601; EP 08758909 A 20080530; EP 2008004339 W 20080530; JP 2010509747 A 20080530; US 60201908 A 20080530