EP 2156926 A1 20100224 - METHOD OF POLISHING GLASS SUBSTRATE
Title (en)
METHOD OF POLISHING GLASS SUBSTRATE
Title (de)
VERFAHREN ZUM POLIEREN EINES GLASSUBSTRATS
Title (fr)
PROCÉDÉ DE POLISSAGE D'UN SUBSTRAT EN VERRE
Publication
Application
Priority
- JP 2008060231 W 20080603
- JP 2007149705 A 20070605
Abstract (en)
An object of the present invention is to provide a polishing method for diminishing concave defects of a glass substrate used in a reflective mask for EUVL and the like. The invention relates to a method of polishing a glass substrate which comprises polishing a major surface of the glass substrate while feeding a polishing slurry between the glass substrate and a pad surface of a polishing pad, wherein the polishing load of the polishing pad is from 1 to 60 g/cm 2 . The pad surface of the polishing pad is preferably dressing-processed.
IPC 8 full level
B24B 37/00 (2012.01); B24B 37/005 (2012.01); B24B 37/24 (2012.01); B24B 53/017 (2012.01); G03F 1/14 (2006.01)
CPC (source: EP KR US)
B24B 37/00 (2013.01 - KR); B24B 37/042 (2013.01 - EP US); B24B 49/16 (2013.01 - EP US); B82Y 10/00 (2013.01 - EP US); B82Y 40/00 (2013.01 - EP US); C03C 19/00 (2013.01 - EP US); G03F 1/00 (2013.01 - KR); G03F 1/24 (2013.01 - EP US); G03F 1/68 (2013.01 - KR)
Citation (search report)
See references of WO 2008149864A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA MK RS
DOCDB simple family (publication)
EP 2156926 A1 20100224; JP 2009012164 A 20090122; JP 5332249 B2 20131106; KR 20100019989 A 20100219; TW 200906550 A 20090216; US 2010075577 A1 20100325; US 8070557 B2 20111206; WO 2008149864 A1 20081211
DOCDB simple family (application)
EP 08765044 A 20080603; JP 2008060231 W 20080603; JP 2008071280 A 20080319; KR 20097025355 A 20080603; TW 97120956 A 20080605; US 63100409 A 20091204