EP 2162987 A1 20100317 - INTEGRATED CAPACITIVE SENSOR
Title (en)
INTEGRATED CAPACITIVE SENSOR
Title (de)
INTEGRIERTER KAPAZITIVER SENSOR
Title (fr)
CAPTEUR CAPACITIF INTÉGRÉ
Publication
Application
Priority
- EP 2008004206 W 20080527
- DE 102007025947 A 20070604
Abstract (en)
[origin: WO2008148481A1] The invention relates to an integrated capacitive sensor circuit, having a capacitive sensor (24) formed in an upper metallization layer (22) of the integrated capacitive sensor circuit, having at least two electrodes (22a, 22b) disposed in the upper metallization layer, and an electronic analysis circuit (14) coupled to the capacitive sensor (24) for determining a change in capacity of the capacitive sensor (24), wherein the capacitive sensor (24) and the analysis circuit (14) are mutually integrated on a semiconductor substrate (12).
IPC 8 full level
H03K 17/955 (2006.01)
CPC (source: EP)
H03K 17/955 (2013.01); H03K 2217/960755 (2013.01)
Citation (search report)
See references of WO 2008148481A1
Citation (examination)
- US 6970126 B1 20051129 - O'DOWD JOHN [IE], et al
- US 3761736 A 19730925 - MALCOLM EDGE G, et al
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA MK RS
DOCDB simple family (publication)
DE 102007025947 A1 20081211; DE 102007025947 B4 20090226; EP 2162987 A1 20100317; WO 2008148481 A1 20081211
DOCDB simple family (application)
DE 102007025947 A 20070604; EP 08758791 A 20080527; EP 2008004206 W 20080527