EP 2165003 A1 20100324 - PDV METHOD AND PDV DEVICE FOR PRODUCING LOW FRICTION, WEAR RESISTANT, FUNCTIONAL COATINGS, AND COATINGS PRODUCED THEREWITH
Title (en)
PDV METHOD AND PDV DEVICE FOR PRODUCING LOW FRICTION, WEAR RESISTANT, FUNCTIONAL COATINGS, AND COATINGS PRODUCED THEREWITH
Title (de)
PDV-VERFAHREN UND PVD-VORRICHTUNG ZUR ERZEUGUNG VON REIBUNGSARMEN, VERSCHLEISSBESTÄNDIGEN FUNKTIONSSCHICHTEN UND DAMIT HERGESTELLTE BESCHICHTUNGEN
Title (fr)
PROCÉDÉ DE PVD ET DISPOSITIF DE PVD POUR PRODUIRE DES COUCHES FONCTIONNELLES À FAIBLE FROTTEMENT, RÉSISTANT À L'USURE ET REVÊTEMENTS AINSI PRODUITS
Publication
Application
Priority
- EP 2008004657 W 20080611
- DE 102007028813 A 20070620
- DE 102007058356 A 20071203
Abstract (en)
[origin: WO2008155051A1] The invention relates to a PVD method and a PVD device for producing diamond-like (DLC) coatings with high adhesion and substrates coated according to the PVD method. The substrates which are to be coated are pretreated by means of high power impulse magnetron sputtering (HIPIMS) of tungsten carbide (WC) and subsequently provided with a transition layer of WC. Subsequently, a C-DLC or a W-DLC layer is produced by means of magnetron cathode sputtering (MS).
IPC 8 full level
C23C 14/02 (2006.01); C23C 14/06 (2006.01); C23C 14/34 (2006.01)
CPC (source: EP)
C23C 14/024 (2013.01); C23C 14/0605 (2013.01); C23C 14/0635 (2013.01); C23C 14/345 (2013.01); C23C 14/352 (2013.01); H01J 37/34 (2013.01); H01J 37/3405 (2013.01); H01J 37/3467 (2013.01)
Citation (search report)
See references of WO 2008155051A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA MK RS
DOCDB simple family (publication)
DE 102007058356 A1 20081224; EP 2165003 A1 20100324; WO 2008155051 A1 20081224
DOCDB simple family (application)
DE 102007058356 A 20071203; EP 08773386 A 20080611; EP 2008004657 W 20080611