EP 2173999 B1 20160907 - DEVICE FOR GENERATING RADIOFREQUENCY PLASMA
Title (en)
DEVICE FOR GENERATING RADIOFREQUENCY PLASMA
Title (de)
VORRICHTUNG ZUR ERZEUGUNG EINES FUNKFREQUENZPLASMAS
Title (fr)
DISPOSITIF DE GENERATION DE PLASMA RADIOFREQUENCE
Publication
Application
Priority
- FR 2008051433 W 20080730
- FR 0705773 A 20070808
Abstract (en)
[origin: WO2009024713A1] The invention relates to a device for generating a radiofrequency plasma, that comprises a voltage generator (5), and at least one ignition assembly (9) that comprises: an ignition plug (4); and a switch (7) provided between a supply terminal of the plug (4) and an output of the generator (5) adapted for electrically connecting the output of the voltage generator (5) to said plug (4) upon the reception of a control signal (V1), wherein the device includes an electronic control unit (UC) generating said control signal (V1). The electronic control unit (UC) includes means (M) for measuring values representative of the evolution in time of the output voltage of the generator (5), and the device (A) includes means for varying the voltage and/or the frequency of the electric current applied to said supply terminal of the plug based on measured values. The evolution of the generator output voltage is representative of the condition of the plug (new or used).
IPC 8 full level
F02P 9/00 (2006.01); F02P 17/12 (2006.01); F02P 23/04 (2006.01)
CPC (source: EP KR US)
F02P 9/007 (2013.01 - EP KR US); F02P 17/12 (2013.01 - KR); F02P 23/04 (2013.01 - EP KR US); F02P 17/12 (2013.01 - EP US); F02P 2017/121 (2013.01 - EP KR US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
DOCDB simple family (publication)
FR 2919901 A1 20090213; FR 2919901 B1 20100226; BR PI0815098 A2 20150218; CN 101815859 A 20100825; CN 101815859 B 20120530; EP 2173999 A1 20100414; EP 2173999 B1 20160907; JP 2010535976 A 20101125; JP 5238026 B2 20130717; KR 20100052473 A 20100519; MX 2010001514 A 20100310; RU 2010108323 A 20110920; RU 2474723 C2 20130210; US 2011163673 A1 20110707; US 8656897 B2 20140225; WO 2009024713 A1 20090226; WO 2009024713 A9 20090423
DOCDB simple family (application)
FR 0705773 A 20070808; BR PI0815098 A 20080730; CN 200880102481 A 20080730; EP 08827797 A 20080730; FR 2008051433 W 20080730; JP 2010519495 A 20080730; KR 20107002795 A 20080730; MX 2010001514 A 20080730; RU 2010108323 A 20080730; US 67228608 A 20080730