EP 2176440 A2 20100421 - METHOD AND APPARATUS FOR APPLYING A LAYER OF A SEPARATING AGENT TO A SUBSTRATE
Title (en)
METHOD AND APPARATUS FOR APPLYING A LAYER OF A SEPARATING AGENT TO A SUBSTRATE
Title (de)
VERFAHREN UND VORRICHTUNG ZUR AUFBRINGUNG EINER SCHICHT EINES TRENNMITTELS AUF EIN SUBSTRAT
Title (fr)
PROCÉDÉ ET DISPOSITIF D'APPLICATION D'UNE COUCHE D'UN AGENT DE SÉPARATION SUR UN SUBSTRAT
Publication
Application
Priority
- EP 2008005428 W 20080703
- DE 102007031457 A 20070705
Abstract (en)
[origin: CN101337220A] In a method which is used for coating a separating agent layer into a moving or movable substrate in a vacuum chamber, the separating agent is evaporated in an internal chamber of evaporator chamber which is provided with at least one nozzle that is aligned to the substrate. The method orders that the liquid separating agent used for vaporizing is sprayed into the internal chamber of the evaporator chamber. In a device thereof which is used for coating the separating agent into a moving or movable substrate in the vacuum chamber, the vacuum chamber is provided with at least one metal evaporator. The device is provided with an evaporator chamber which is configured with at least one nozzle aligned to the substrate, wherein the separating agent can be delivered to the internal chamber of the evaporator chamber through the conveying pipeline. Hereon, the conveying pipeline is connected with a spraying device, and the liquid separating agent which is used for vaporizing can be sprayed or be sprayed into the internal chamber of the evaporator chamber with the spraying device.
IPC 8 full level
C23C 14/04 (2006.01); C23C 14/56 (2006.01)
CPC (source: EP US)
C23C 14/042 (2013.01 - EP US); C23C 14/243 (2013.01 - EP US); C23C 14/246 (2013.01 - EP US); C23C 14/562 (2013.01 - EP US)
Citation (search report)
See references of WO 2009003701A2
Citation (examination)
US 2004149959 A1 20040805 - MIKHAEL MICHAEL G [US], et al
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA MK RS
DOCDB simple family (publication)
DE 102007031457 A1 20090108; CN 101337220 A 20090107; EP 2176440 A2 20100421; JP 2010532426 A 20101007; US 2009011127 A1 20090108; WO 2009003701 A2 20090108; WO 2009003701 A3 20090423
DOCDB simple family (application)
DE 102007031457 A 20070705; CN 200710164307 A 20071019; EP 08773839 A 20080703; EP 2008005428 W 20080703; JP 2010513783 A 20080703; US 94749107 A 20071129