EP 2182340 A1 20100505 - Pressure Sensor and Guide Wire Assembly
Title (en)
Pressure Sensor and Guide Wire Assembly
Title (de)
Drucksensor und Führungsdrahtanordnung
Title (fr)
Capteur de pression et ensemble de fil guide
Publication
Application
Priority
EP 08167971 A 20081030
Abstract (en)
A pressure sensor chip is described. The pressure sensor chip include a substrate, a polycrystalline silicon layer, at least one silicon layer, and a diaphragm movement element. The polycrystalline silicon layer is formed on the substrate and has a cavity recess formed therein. The at least one silicon layer is formed on the polycrystalline silicon layer and covers the cavity recess thereby forming a reference chamber with a diaphragm. The diaphragm movement element is configured to sense movement of the diaphragm. An assembly incorporating the pressure sensor chip and a method of forming the pressure sensor chip are also described.
IPC 8 full level
G01L 9/00 (2006.01); G01L 19/00 (2006.01)
CPC (source: EP)
A61B 5/0215 (2013.01); A61B 5/6851 (2013.01); G01L 9/0055 (2013.01); G01L 19/0092 (2013.01)
Citation (applicant)
- US 6112598 A 20000905 - TENERZ LARS [SE], et al
- US 35648 A 18620617
- US 6167763 B1 20010102 - TENERZ LARS [SE], et al
- US RE39863 E 20071002 - SMITH LEIF [SE]
- US 6131466 A 20001017 - VIGNA BENEDETTO [IT], et al
- US 5510276 A 19960423 - DIEM BERNARD [FR], et al
- US 5095401 A 19920310 - ZAVRACKY PAUL M [US], et al
- US 6272928 B1 20010814 - KURTZ ANTHONY D [US]
- US 6510742 B1 20030128 - JOHNSON RUSSELL L [US]
- US 7207227 B2 20070424 - RANGSTEN PELLE [SE], et al
- US 2006117860 A1 20060608 - KURTZ ANTHONY D [US]
- US 2008202249 A1 20080828 - YOKURA HISANORI [JP], et al
- US 6510742 B1 20030128 - JOHNSON RUSSELL L [US]
- US 6272928 B1 20010814 - KURTZ ANTHONY D [US]
- US RE39863 E 20071002 - SMITH LEIF [SE]
- US 6167763 B1 20010102 - TENERZ LARS [SE], et al
- NICO H. J. PIJLS: "Fractional Flow Reserve", CIRCULATION, vol. 92, no. 11, 1 December 1995 (1995-12-01)
Citation (search report)
- [X] EP 1876434 A2 20080109 - HYDAC ELECTRONIC GMBH [DE]
- [X] US 6510742 B1 20030128 - JOHNSON RUSSELL L [US]
- [X] US 2008202249 A1 20080828 - YOKURA HISANORI [JP], et al
- [A] US 2006117860 A1 20060608 - KURTZ ANTHONY D [US]
- [A] US 6272928 B1 20010814 - KURTZ ANTHONY D [US]
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA MK RS
DOCDB simple family (publication)
DOCDB simple family (application)
EP 08167971 A 20081030