EP 2191698 B1 20121003 - RADIATION SOURCE
Title (en)
RADIATION SOURCE
Title (de)
STRAHLUNGSQUELLE
Title (fr)
SOURCE DE RAYONNEMENT
Publication
Application
Priority
- IB 2008002201 W 20080820
- US 93564307 P 20070823
- US 7866308 A 20080402
Abstract (en)
[origin: WO2009024860A2] A radiation source comprising a chamber and a supply of a plasma generating substance, the source having an interaction point at which the plasma generating substance introduced into the chamber may interact with a laser beam and thereby produce a radiation emitting plasma, wherein the source further comprises a conduit arranged to deliver a buffer gas into the chamber, the conduit having an outlet which is adjacent to the interaction point.
IPC 8 full level
H05G 2/00 (2006.01)
CPC (source: EP)
H05G 2/003 (2013.01); H05G 2/008 (2013.01)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2009024860 A2 20090226; WO 2009024860 A3 20090416; CN 101785368 A 20100721; CN 101785368 B 20130102; EP 2191698 A2 20100602; EP 2191698 B1 20121003; JP 2010537377 A 20101202; JP 5659015 B2 20150128; KR 101528581 B1 20150612; KR 20100049607 A 20100512; NL 1035846 A1 20090224; NL 1035863 A1 20090224; TW 200919112 A 20090501; TW I448828 B 20140811
DOCDB simple family (application)
IB 2008002201 W 20080820; CN 200880103732 A 20080820; EP 08806915 A 20080820; JP 2010521496 A 20080820; KR 20107003754 A 20080820; NL 1035846 A 20080819; NL 1035863 A 20080825; TW 97132223 A 20080822