EP 2192997 A2 20100609 - METHOD OF DEPOSITING A FLUORINATED LAYER FROM A PRECURSOR MONOMER
Title (en)
METHOD OF DEPOSITING A FLUORINATED LAYER FROM A PRECURSOR MONOMER
Title (de)
VERFAHREN ZUM AUFTRAGEN EINER FLUORIERTEN SCHICHT AUS EINEM VORLÄUFERMONOMER
Title (fr)
PROCÉDÉ POUR DÉPOSER UNE COUCHE FLUORÉE À PARTIR D'UN MONOMÈRE PRÉCURSEUR
Publication
Application
Priority
- EP 2008061814 W 20080905
- EP 07115864 A 20070906
- EP 08152409 A 20080306
- EP 08803783 A 20080905
Abstract (en)
[origin: WO2009030763A2] The invention relates to a method for depositing a fluorinated layer onto a substrate, said method comprising the injection of a gaseous mixture containing a fluorinated compound and a carrier gas into a zone for the discharge or post-discharge of an atmospheric cold plasma at a pressure of between 0.8 and 1.2 bar. The invention is characterised in that the fluorinated compound has a boiling temperature higher than 25°C at a pressure of 1 bar.
IPC 8 full level
CPC (source: EP US)
B05D 1/62 (2013.01 - EP US); B05D 5/083 (2013.01 - EP US)
Citation (search report)
See references of WO 2009030763A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA MK RS
DOCDB simple family (publication)
WO 2009030763 A2 20090312; WO 2009030763 A3 20090604; CA 2698629 A1 20090312; CN 101821020 A 20100901; EP 2192997 A2 20100609; JP 2010538161 A 20101209; US 2011014395 A1 20110120
DOCDB simple family (application)
EP 2008061814 W 20080905; CA 2698629 A 20080905; CN 200880110572 A 20080905; EP 08803783 A 20080905; JP 2010523519 A 20080905; US 67669208 A 20080905