EP 2198447 A2 20100623 - DEVICE FOR THE PLASMA TREATMENT OF WORKPIECES
Title (en)
DEVICE FOR THE PLASMA TREATMENT OF WORKPIECES
Title (de)
VORRICHTUNG ZUR PLASMABEHANDLUNG VON WERKSTÜCKEN
Title (fr)
DISPOSITIF DE TRAITEMENT PLASMA DE PIECES
Publication
Application
Priority
- DE 2008001351 W 20080814
- DE 102007045216 A 20070921
Abstract (en)
[origin: WO2009036722A2] The device is used for the plasma treatment of workpieces. The workpiece is inserted into a chamber of a treatment station, wherein said chamber can be evacuated at least partially. The plasma chamber is delimited by a chamber bottom, a chamber cover, and a lateral chamber wall and has a positionable gas lance. The gas lance is made of a dielectric at least in some regions.
IPC 8 full level
H01J 37/32 (2006.01); B29C 59/14 (2006.01); C23C 16/04 (2006.01); C23C 16/455 (2006.01)
CPC (source: EP US)
C23C 16/045 (2013.01 - EP US); C23C 16/45578 (2013.01 - EP US); C23C 16/511 (2013.01 - EP US); C23C 16/54 (2013.01 - EP US); H01J 37/32192 (2013.01 - EP US); H01J 37/3244 (2013.01 - EP US)
Citation (search report)
See references of WO 2009036722A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA MK RS
DOCDB simple family (publication)
WO 2009036722 A2 20090326; WO 2009036722 A3 20090528; CN 101855698 A 20101006; CN 101855698 B 20120321; DE 102007045216 A1 20090402; EP 2198447 A2 20100623; JP 2010539333 A 20101216; US 2011023781 A1 20110203
DOCDB simple family (application)
DE 2008001351 W 20080814; CN 200880108215 A 20080814; DE 102007045216 A 20070921; EP 08801174 A 20080814; JP 2010525189 A 20080814; US 67929108 A 20080814