EP 2198449 B1 20180124 - WIDE ANGLE HIGH RESOLUTION ATOM PROBE
Title (en)
WIDE ANGLE HIGH RESOLUTION ATOM PROBE
Title (de)
HOCHAUFLÖSENDE WEITWINKEL-ATOMSONDE
Title (fr)
SONDE ATOMIQUE TOMOGRAPHIQUE GRAND ANGLE A HAUTE RESOLUTION
Publication
Application
Priority
- EP 2008063462 W 20081008
- FR 0707178 A 20071012
Abstract (en)
[origin: WO2009047265A1] The invention pertains to improvements in the mass resolution of wide-angle tomographic atomic probes. The invention comprises an atomic probe including, in addition to a sample-holding device and to detectors remote from each other by a distance L and enclosed in a housing, an electrostatic lens of the Einzel type made of three electrodes arranged inside the housing between the sample and the detector and to which electric potentials are applied in order to generate an electric field that strongly focalises the ion beam emitted by the sample under test during the probe operation. According to the invention, the geometry of the electrodes is defined accurately in order to substantially limit the spherical aberration effects undergone by the Einzel lens on the ion beam, of which the spherical aberration is particularly important when the lens is strongly polarised. The invention can particularly be used for atomic probes referred to as "3D atom probes."
IPC 8 full level
H01J 49/40 (2006.01)
CPC (source: EP US)
H01J 49/0004 (2013.01 - EP US); H01J 49/40 (2013.01 - EP US)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
DOCDB simple family (publication)
FR 2922350 A1 20090417; FR 2922350 B1 20091204; EP 2198449 A1 20100623; EP 2198449 B1 20180124; US 2010223698 A1 20100902; US 8074292 B2 20111206; WO 2009047265 A1 20090416
DOCDB simple family (application)
FR 0707178 A 20071012; EP 08838185 A 20081008; EP 2008063462 W 20081008; US 68270008 A 20081008