EP 2198668 A1 20100623 - APPARATUS FOR AN IRRADIATION UNIT
Title (en)
APPARATUS FOR AN IRRADIATION UNIT
Title (de)
VORRICHTUNG FÜR EINE BESTRAHLUNGSEINHEIT
Title (fr)
DISPOSITIF POUR UNITÉ D'IRRADIATION
Publication
Application
Priority
- EP 2008008045 W 20080923
- DE 102007048564 A 20071009
Abstract (en)
[origin: WO2009049752A1] The invention relates to an apparatus with a chamber (1) for irradiating at least one substrate (2), comprising a lock for introducing and removing the substrate (2), a substrate holder within the chamber, a vacuum pump (4) and at least one irradiation unit (5) for irradiating the substrate (2), wherein the irradiation unit (5) comprises at least one infrared radiator with an integrated reflector.
IPC 8 full level
H05B 3/00 (2006.01); C23C 14/54 (2006.01); C23C 16/48 (2006.01)
CPC (source: EP US)
C23C 16/481 (2013.01 - EP US); H05B 3/0038 (2013.01 - EP US); H05B 2203/032 (2013.01 - EP US)
Citation (search report)
See references of WO 2009049752A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA MK RS
DOCDB simple family (publication)
DE 102007048564 A1 20090423; CN 101822122 A 20100901; EP 2198668 A1 20100623; US 2010219355 A1 20100902; WO 2009049752 A1 20090423
DOCDB simple family (application)
DE 102007048564 A 20071009; CN 200880110757 A 20080923; EP 08802533 A 20080923; EP 2008008045 W 20080923; US 68241308 A 20080923