EP 2201331 A1 20100630 - MICROMECHANICAL DEVICE HAVING A DRIVE FRAME
Title (en)
MICROMECHANICAL DEVICE HAVING A DRIVE FRAME
Title (de)
MIKROMECHANISCHE VORRICHTUNG MIT ANTRIEBSRAHMEN
Title (fr)
DISPOSITIF MICROMÉCANIQUE À CADRE DE COMMANDE
Publication
Application
Priority
- EP 2008062936 W 20080926
- DE 102007049341 A 20071012
- DE 102007051591 A 20071029
Abstract (en)
[origin: WO2009050021A1] The invention relates to a micromechanical device having at least one drive frame (10, 15, 17) and at least one vibrator (20, 25, 27), wherein the vibrator (20, 25, 27) is disposed in a region (50) surrounded by the drive frame (10, 15, 17), wherein the vibrator (20, 25, 27) is mechanically coupled to the drive frame (10, 15, 17). The core of the invention is that the drive frame (10, 15, 17) can be excited to generate a flexural vibration (100).
IPC 8 full level
G01C 19/56 (2012.01)
CPC (source: EP US)
G01C 19/5684 (2013.01 - EP US); G01C 19/5747 (2013.01 - EP US)
Citation (search report)
See references of WO 2009050021A1
Citation (examination)
- EP 1936805 A1 20080625 - COMMISSARIAT ENERGIE ATOMIQUE [FR]
- FR 2876180 A1 20060407 - COMMISSARIAT ENERGIE ATOMIQUE [FR]
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA MK RS
DOCDB simple family (publication)
DE 102007051591 A1 20090416; DE 102007051591 B4 20190425; CN 101821587 A 20100901; CN 101821587 B 20131211; EP 2201331 A1 20100630; JP 2011500337 A 20110106; US 2010199762 A1 20100812; WO 2009050021 A1 20090423
DOCDB simple family (application)
DE 102007051591 A 20071029; CN 200880111181 A 20080926; EP 08804811 A 20080926; EP 2008062936 W 20080926; JP 2010528354 A 20080926; US 45254608 A 20080926