EP 2203033 B1 20140910 - Extreme ultraviolet light source device
Title (en)
Extreme ultraviolet light source device
Title (de)
Extremultraviolette Lichtquellenvorrichtung
Title (fr)
Dispositif de source lumineuse à rayonnement ultraviolet extrême
Publication
Application
Priority
JP 2008329570 A 20081225
Abstract (en)
[origin: EP2203033A2] The invention relates to an extreme ultraviolet light source device, comprising a pair of discharge electrodes (2a, 2b, 52a, 52b) arranged spaced apart from each other; a pulsed power supply means (3, 53) supplying pulsed power to said discharge electrodes (2a, 2b); a raw material supply means (7) adapted for supplying raw material (M) for generating extreme ultraviolet radiation onto said discharge electrodes (2a, 2b, 52a, 52b); an energy beam emitting means (10, 60) adapted for radiating an energy beam (LB2) to the raw material (M) on said discharge electrodes (2a, 2b, 52a, 52b) to gasify said raw material (M); a means (11, 61, 85, 95, 105) for forming a depression (MA) in the raw material (M) supplied onto said discharge electrodes (2a, 2b, 52a, 52b); and a controller (6, 56). Said controller (6, 56) is adapted to control the depression forming means (11, 61, 85, 95, 105) such that it forms a depression (MA) in the raw material (M) supplied onto the discharge electrodes (2a, 2b, 52a, 52b) before the voltage between the electrodes (2a, 2b, 52a, 52b) increases by means of the supply of pulsed power to the discharge electrodes (2a, 2b, 52a, 52b) by said pulsed power supply means (3, 53), and before the energy beam (LB2) is radiated to the raw material (M) on the electrodes (2a, 2b, 52a, 52b) by said energy beam emitting means (10, 60). The invention also relates to a process for generating EUV radiation.
IPC 8 full level
CPC (source: EP)
G21K 1/00 (2013.01); H05G 2/001 (2013.01)
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
DOCDB simple family (publication)
EP 2203033 A2 20100630; EP 2203033 A3 20100908; EP 2203033 B1 20140910; JP 2010153563 A 20100708; JP 4893730 B2 20120307
DOCDB simple family (application)
EP 09015807 A 20091221; JP 2008329570 A 20081225