EP 2205874 A1 20100714 - TURBOMOLECULAR PUMP
Title (en)
TURBOMOLECULAR PUMP
Title (de)
TURBOMOLEKULARPUMPE
Title (fr)
POMPE TURBOMOLÉCULAIRE
Publication
Application
Priority
- EP 2008064747 W 20081030
- DE 102007051988 A 20071031
Abstract (en)
[origin: WO2009056606A1] The invention relates to a turbomolecular pump (10) having a pump housing (14) and multiple separate stator blade ring discs (16), which form a ring disc packet (18) together. A cylindrical friction bush (20) is disposed directly between the ring disc packet (18) and the pump housing (14). An axial gap (22) is provided axially between the ring disc packet (18) and the pump housing (14), so the ring disc packet (18) can be rotated.
IPC 8 full level
F04D 19/04 (2006.01); F04D 27/02 (2006.01)
CPC (source: EP)
F04D 19/042 (2013.01); F04D 27/008 (2013.01); F04D 29/522 (2013.01)
Citation (search report)
See references of WO 2009056606A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA MK RS
DOCDB simple family (publication)
DE 102007051988 A1 20090507; CN 101842597 A 20100922; EP 2205874 A1 20100714; JP 2011501037 A 20110106; TW 200925429 A 20090616; WO 2009056606 A1 20090507
DOCDB simple family (application)
DE 102007051988 A 20071031; CN 200880114192 A 20081030; EP 08845937 A 20081030; EP 2008064747 W 20081030; JP 2010530493 A 20081030; TW 97140768 A 20081024