EP 2205955 A2 20100714 - PRESSURE MEASURING DEVICE
Title (en)
PRESSURE MEASURING DEVICE
Title (de)
DRUCK-MESSEINRICHTUNG
Title (fr)
DISPOSITIF DE MESURE DE PRESSION
Publication
Application
Priority
- EP 2008065137 W 20081107
- DE 102007053859 A 20071109
Abstract (en)
[origin: WO2009060069A2] The invention relates to a pressure measuring device comprising a base (13, 13'), an intermediate piece (15, 15') that is arranged on the base (13, 13') and connected thereto, comprising a semiconductor, and a semiconductor pressure sensor (17) that is arranged on the intermediate piece (15, 15') and connected thereto, comprising a carrier (19) and a measuring membrane (21). Said pressure measuring device can protect the sensitive measuring membrane (21) against mechanical strains in a reliable manner. The inside of the intermediate piece (15;15') comprises an annular-shaped peripheral recess (33 ) that surrounds a first cylindrical section (35) and a second cylindrical section (37) of the intermediate piece (15, 15') that is adjacent to first base-side thereof. The second cylindrical section (37) has a larger outer diameter than the first cylindrical section (35), and the recess is open towards the side of the intermediate piece (15, 15') that is oriented towards the base (13, 13'). The second cylindrical section (37) has a front surface that is oriented towards the base (13, 13'), that rests on an exposed front surface of the base (13, 13'), that forms a connection surface by means of which the intermediate piece (15, 15') can be mechanically connected in a rigid manner to the base (13, 13').
IPC 8 full level
G01L 19/14 (2006.01)
CPC (source: EP US)
G01L 19/147 (2013.01 - EP US)
Citation (search report)
See references of WO 2009060069A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA MK RS
DOCDB simple family (publication)
DE 102007053859 A1 20090514; CN 102257372 A 20111123; CN 102257372 B 20140716; EP 2205955 A2 20100714; RU 2441208 C1 20120127; US 2010308426 A1 20101209; US 8304844 B2 20121106; WO 2009060069 A2 20090514; WO 2009060069 A3 20101028
DOCDB simple family (application)
DE 102007053859 A 20071109; CN 200880115289 A 20081107; EP 08846746 A 20081107; EP 2008065137 W 20081107; RU 2010123359 A 20081107; US 73454508 A 20081107