EP 2211594 A3 20110202 - Extreme ultraviolet light source device
Title (en)
Extreme ultraviolet light source device
Title (de)
Extrem ultraviolette Lichtquellenvorrichtung
Title (fr)
Dispositif de source lumineuse à ultraviolet extrême
Publication
Application
Priority
JP 2009010691 A 20090121
Abstract (en)
[origin: EP2211594A2] The invention relates to an extreme ultraviolet light source device, comprising a pair of discharge electrodes (11, 12) arranged oppositely to each other, a pulsed power supply means (8) supplying pulsed power to said discharge electrodes (11, 12), a raw material supply means (11b, 12b) supplying a liquid or solid raw material for the emission of extreme ultraviolet radiation to said discharge electrodes (11, 12) and onto these electrodes (11, 12), and an energy beam radiating means (23a) radiating a focused energy beam (23) towards said raw material (11a) having been supplied onto said discharge electrodes (11, 12) to gasify said raw material (11a) and to start a discharge between said pair of electrodes (11, 12).The surface of said raw material (11a) is arranged at a position shifted from the focal point (P) of the energy beam (23) towards the irradiation entrance side of the energy beam (23).
IPC 8 full level
H05G 2/00 (2006.01)
CPC (source: EP)
H05G 2/003 (2013.01); H05G 2/005 (2013.01)
Citation (search report)
- [A] US 2007090304 A1 20070426 - JONKERS JEROEN [DE], et al
- [A] US 2008187105 A1 20080807 - NEFF JAKOB WILLI [BE], et al
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
Designated extension state (EPC)
AL BA RS
DOCDB simple family (publication)
EP 2211594 A2 20100728; EP 2211594 A3 20110202; EP 2211594 B1 20110810; AT E520289 T1 20110815; JP 2010170772 A 20100805; JP 5245857 B2 20130724
DOCDB simple family (application)
EP 10000408 A 20100118; AT 10000408 T 20100118; JP 2009010691 A 20090121