Global Patent Index - EP 2211594 A3

EP 2211594 A3 20110202 - Extreme ultraviolet light source device

Title (en)

Extreme ultraviolet light source device

Title (de)

Extrem ultraviolette Lichtquellenvorrichtung

Title (fr)

Dispositif de source lumineuse à ultraviolet extrême

Publication

EP 2211594 A3 20110202 (EN)

Application

EP 10000408 A 20100118

Priority

JP 2009010691 A 20090121

Abstract (en)

[origin: EP2211594A2] The invention relates to an extreme ultraviolet light source device, comprising a pair of discharge electrodes (11, 12) arranged oppositely to each other, a pulsed power supply means (8) supplying pulsed power to said discharge electrodes (11, 12), a raw material supply means (11b, 12b) supplying a liquid or solid raw material for the emission of extreme ultraviolet radiation to said discharge electrodes (11, 12) and onto these electrodes (11, 12), and an energy beam radiating means (23a) radiating a focused energy beam (23) towards said raw material (11a) having been supplied onto said discharge electrodes (11, 12) to gasify said raw material (11a) and to start a discharge between said pair of electrodes (11, 12).The surface of said raw material (11a) is arranged at a position shifted from the focal point (P) of the energy beam (23) towards the irradiation entrance side of the energy beam (23).

IPC 8 full level

H05G 2/00 (2006.01)

CPC (source: EP)

H05G 2/003 (2013.01); H05G 2/005 (2013.01)

Citation (search report)

Designated contracting state (EPC)

AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

Designated extension state (EPC)

AL BA RS

DOCDB simple family (publication)

EP 2211594 A2 20100728; EP 2211594 A3 20110202; EP 2211594 B1 20110810; AT E520289 T1 20110815; JP 2010170772 A 20100805; JP 5245857 B2 20130724

DOCDB simple family (application)

EP 10000408 A 20100118; AT 10000408 T 20100118; JP 2009010691 A 20090121