EP 2212901 A2 20100804 - EQUIPMENT FOR PRODUCING SEMICONDUCTORS AND CORRESPONDING PUMPING DEVICE AND SUBSTRATE HOLDER
Title (en)
EQUIPMENT FOR PRODUCING SEMICONDUCTORS AND CORRESPONDING PUMPING DEVICE AND SUBSTRATE HOLDER
Title (de)
AUSRÜSTUNG ZUR HERSTELLUNG VON HALBLEITERN SOWIE ENTSPRECHENDE PUMPVORRICHTUNG UND SUBSTRATHALTER DAFÜR
Title (fr)
EQUIPEMENT POUR LA FABRICATION DE SEMI-CONDUCTEURS, DISPOSITIF DE POMPAGE ET PORTE-SUBSTRAT CORRESPONDANTS
Publication
Application
Priority
- FR 2008052101 W 20081121
- FR 0759189 A 20071121
Abstract (en)
[origin: WO2009071815A2] The invention relates to a piece of equipment for producing semiconductors, comprising a process chamber (2), a substrate holder (5) for holding a substrate (6) for processing within said chamber (2) and a pumping device (4), comprising a vacuum pump (7) in which a flow of gas for pumping may flow between a gas inlet (9) and a gas outlet (10) of which said inlet (9) is connected to the process chamber (2), the substrate holder (5) and the vacuum pump (7) being in the same axis (12), the substrate holder (5) being arranged upstream of said inlet (9) of said vacuum pump (7) in the flow of gas for pumping, characterised in that the pumping device (4) comprises a gas pressure regulation means (8) at the outlet (10) of the vacuum pump (7), for controlling the pressure of the gas at the inlet (9) of the vacuum pump (7) and that the substrate holder (5) comprises at least three support branches (21) connected to a support (20) on the substrate holder (5) in order to fix the support (20) to the process chamber (2) and to provides services to the support (20), at least one branch (21) comprising at least one duct (22), for the passage of said services.
IPC 8 full level
H01J 37/32 (2006.01); H01L 21/68 (2006.01)
CPC (source: EP KR US)
H01J 37/3244 (2013.01 - EP KR US); H01J 37/32834 (2013.01 - EP KR US); H01L 21/0262 (2013.01 - KR); H01L 21/67017 (2013.01 - EP KR US); H01L 21/68 (2013.01 - KR); Y10T 137/85978 (2015.04 - EP US)
Citation (search report)
See references of WO 2009071815A2
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA MK RS
DOCDB simple family (publication)
FR 2923946 A1 20090522; EP 2212901 A2 20100804; JP 2011504298 A 20110203; KR 20100087725 A 20100805; US 2010294431 A1 20101125; WO 2009071815 A2 20090611; WO 2009071815 A3 20090730
DOCDB simple family (application)
FR 0759189 A 20071121; EP 08856396 A 20081121; FR 2008052101 W 20081121; JP 2010534526 A 20081121; KR 20107011155 A 20081121; US 73459808 A 20081121