EP 2220265 A1 20100825 - PVD VACUUM COATING UNIT
Title (en)
PVD VACUUM COATING UNIT
Title (de)
PVD - VAKUUMBESCHICHTUNGSANLAGE
Title (fr)
APPAREIL DE REVÊTEMENT SOUS VIDE PAR DPV
Publication
Application
Priority
- CH 2008000485 W 20081117
- CH 18902007 A 20071206
Abstract (en)
[origin: WO2009070903A1] A vacuum coating unit contains a reactive gas inlet (12), at least one PVD coating source (8, 21) having a sheet-like cathode (11) and a substrate carrier (6) containing a plurality of substrates (7), where the substrate carrier (6) forms a two-dimensional horizontal extension and is positioned between at least two PVD coating sources and the plurality of substrates (7) are cutting tools having at least one cutting edge (E) in the peripheral region of the sheet-like substrate (7) and are distributed in a plane of the two-dimensional extension of the substrate carrier (6), where the substrate carrier (6) is positioned in a horizontal plane (3) in the vacuum process chamber (1) at a spacing between the sheet-like cathodes (11) of the at least two PVD coating sources (8, 21) in such a way that at least a part of each of the at least one cutting edge (E) contains an active cutting edge (E') which is at all times exposed in direct line of sight to at least one of the cathodes (11) of the PVD coating sources (8, 21).
IPC 8 full level
C23C 14/32 (2006.01); C23C 14/50 (2006.01)
CPC (source: EP US)
C23C 14/325 (2013.01 - EP US); C23C 14/50 (2013.01 - EP US); C23C 14/505 (2013.01 - EP US)
Citation (search report)
See references of WO 2009070903A1
Citation (examination)
- JP 2000141108 A 20000523 - HITACHI TOOL ENG
- US 2005056565 A1 20050317 - OLORE PAUL [US], et al
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA MK RS
DOCDB simple family (publication)
WO 2009070903 A1 20090611; BR PI0820014 A2 20150519; CA 2707581 A1 20090611; CN 101889102 A 20101117; CN 101889102 B 20130410; EP 2220265 A1 20100825; JP 2011505262 A 20110224; JP 5449185 B2 20140319; KR 20100094558 A 20100826; MX 2010006214 A 20100623; RU 2010127857 A 20120120; RU 2486280 C2 20130627; SG 10201604607P A 20160728; SG 186624 A1 20130130; TW 200936795 A 20090901; TW I498442 B 20150901; US 2009148599 A1 20090611; US 8968830 B2 20150303
DOCDB simple family (application)
CH 2008000485 W 20081117; BR PI0820014 A 20081117; CA 2707581 A 20081117; CN 200880119186 A 20081117; EP 08856536 A 20081117; JP 2010536303 A 20081117; KR 20107014904 A 20081117; MX 2010006214 A 20081117; RU 2010127857 A 20081117; SG 10201604607P A 20081117; SG 2012089439 A 20081117; TW 97147045 A 20081204; US 27041508 A 20081113