EP 2223577 A1 20100901 - METHOD AND UNIT FOR IGNITING AND MAINTAINING A PLASMA
Title (en)
METHOD AND UNIT FOR IGNITING AND MAINTAINING A PLASMA
Title (de)
VERFAHREN UND EINRICHTUNG ZUR ZÜNDUNG UND AUFRECHTERHALTUNG EINES PLASMAS
Title (fr)
PROCÉDÉ ET DISPOSITIF POUR ACTIVER ET MAINTENIR UN PLASMA
Publication
Application
Priority
- EP 2008064621 W 20081028
- DE 102007055014 A 20071114
Abstract (en)
[origin: WO2009062846A1] The invention relates to a method for igniting and maintaining a plasma in a gas chamber and to a corresponding unit configured as a resonator. The method and the unit are particularly suitable for implementing a plasma light source. The invention proposes that a plasma vessel having at least one hollow space filled with the gas to be ionized be used as the plasma generator, said vessel being made at least partially of a piezoelectric material, or at least one resonance body made of a piezoelectric material protruding into the at least one hollow space, wherein the piezoelectric material is resonantly caused to oscillate by exterior electric excitement. A plasma vessel (1) comprising one or more hollow spaces (2) containing the gas to be ionized is at least partially made of a piezoelectric material, or a resonance body (3) made of a piezoelectric material protrudes into at least one hollow space (2) of the plasma vessel (1). Electrodes (4) are attached to the exterior of the piezoelectric material.
IPC 8 full level
H05H 1/24 (2006.01)
CPC (source: EP)
H01J 65/042 (2013.01); H05H 1/2475 (2013.01); H05H 1/2481 (2021.05)
Citation (search report)
See references of WO 2009062846A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA MK RS
DOCDB simple family (publication)
WO 2009062846 A1 20090522; DE 102007055014 A1 20090528; EP 2223577 A1 20100901
DOCDB simple family (application)
EP 2008064621 W 20081028; DE 102007055014 A 20071114; EP 08848925 A 20081028