EP 2235377 A1 20101006 - TURBO MOLECULAR PUMP
Title (en)
TURBO MOLECULAR PUMP
Title (de)
TURBOMOLEKULARPUMPE
Title (fr)
POMPE TURBOMOLÉCULAIRE
Publication
Application
Priority
- EP 2008066309 W 20081127
- DE 102008004297 A 20080115
Abstract (en)
[origin: WO2009089958A1] The invention relates to a turbo molecular pump, comprising a rotor (12) connected to a drive shaft (10). The rotor (12) has multiple rotor blades (16). The rotor (12) is surrounded by stator rings (26), wherein one stator ring (26) is provided for each rotor blade (16). In order to enable radial expansion of the rotor blade during operation, the stator rings (26) have annular grooves (32).
IPC 8 full level
F04D 19/04 (2006.01)
CPC (source: EP US)
F04D 19/042 (2013.01 - EP US); F04D 29/542 (2013.01 - EP US)
Citation (search report)
See references of WO 2009089958A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA MK RS
DOCDB simple family (publication)
DE 102008004297 A1 20090716; CN 101952602 A 20110119; EP 2235377 A1 20101006; EP 2235377 B1 20141231; JP 2011510201 A 20110331; JP 5546464 B2 20140709; TW 200934957 A 20090816; US 2010322799 A1 20101223; WO 2009089958 A1 20090723
DOCDB simple family (application)
DE 102008004297 A 20080115; CN 200880124830 A 20081127; EP 08870887 A 20081127; EP 2008066309 W 20081127; JP 2010541731 A 20081127; TW 98100324 A 20090107; US 81281408 A 20081127