EP 2235491 A1 20101006 - MICROMECHANICAL PRESSURE SENSOR
Title (en)
MICROMECHANICAL PRESSURE SENSOR
Title (de)
MIKROMECHANISCHER DRUCKSENSOR
Title (fr)
CAPTEUR DE PRESSION MICROMÉCANIQUE
Publication
Application
Priority
- EP 2008068146 W 20081222
- DE 102008003716 A 20080109
Abstract (en)
[origin: WO2009087055A1] The invention relates to a micromechanical pressure sensor with a substrate and a membrane, on which piezoelectric sensor elements are located. The aim of the invention is to provide a pressure sensor which has minimal dimensions and in which torsional loads of the membrane are extensively avoided. This task is solved according to the invention by an arrangement in which the substrate has a frame (1), on which the membrane (2) is arranged, wherein a centrally arranged mass element (3) is located on the underside of the membrane (2) and the membrane (2) is in each case provided with two partial reinforcements (2.1, 2.2) on striated sections, located between frame 1 and the mass element (3).
IPC 8 full level
G01L 9/00 (2006.01)
CPC (source: EP)
G01L 9/0025 (2013.01)
Citation (search report)
See references of WO 2009087055A1
Citation (examination)
- WO 2007073994 A1 20070705 - BOSCH GMBH ROBERT [DE], et al
- US 5068203 A 19911126 - LOGSDON JAMES H [US], et al
- US 6255728 B1 20010703 - NASIRI STEVEN S [US], et al
- DE 4021424 A1 19910124 - TELTOV GERAETE REGLER [DE]
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MT NL NO PL PT RO SE SI SK TR
Designated extension state (EPC)
AL BA MK RS
DOCDB simple family (publication)
WO 2009087055 A1 20090716; DE 102008003716 A1 20090730; EP 2235491 A1 20101006
DOCDB simple family (application)
EP 2008068146 W 20081222; DE 102008003716 A 20080109; EP 08869465 A 20081222