EP 2236245 A3 20130911 - Equipment and method for cleaning polishing cloth
Title (en)
Equipment and method for cleaning polishing cloth
Title (de)
Ausrüstung und Verfahren zum Reinigen eines Polierlappens
Title (fr)
Équipement et procédé pour le nettoyage d'un tissu de polissage
Publication
Application
Priority
JP 2009079630 A 20090327
Abstract (en)
[origin: EP2236245A2] The equipment (34) for cleaning polishing cloth (16) is capable of increasing pressure of washing water received by the polishing cloth (16), securely removing deposits from the polishing cloth (16) and improving polishing efficiency. The equipment (34) is used in a polishing apparatus (10), in which a work piece (20) is pressed onto the polishing cloth (16) adhered on a polishing plate (12) and the work piece (20) is relatively moved with respect to the polishing plate (12) with supplying slurry to the polishing cloth (16) so as to polish the work piece (20). The equipment (34) comprises a nozzle unit (48) having a nozzle (50) capable of spraying high-pressure washing water toward the polishing cloth (16). The nozzle (50) is a straight nozzle capable of linearly spraying the washing water and perpendicularly spraying the washing water with respect to the polishing cloth (16).
IPC 8 full level
B24B 37/04 (2012.01); B24B 53/007 (2006.01); H01L 21/304 (2006.01)
CPC (source: EP US)
B24B 53/017 (2013.01 - EP US)
Citation (search report)
- [XY] US 2004132388 A1 20040708 - KUHN MATTHIAS [DE], et al
- [XY] JP 2003127063 A 20030508 - SONY CORP
- [XY] EP 1103345 A2 20010530 - FUJIKOSHI MACHINERY CORP [JP]
- [Y] JP 2001237204 A 20010831 - HITACHI LTD
- [A] US 5421768 A 19950606 - FUJIWARA YUKIO [JP], et al & JP H079340 A 19950113 - MITSUBISHI MATERIALS CORP, et al
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR
Designated extension state (EPC)
AL BA ME RS
DOCDB simple family (publication)
EP 2236245 A2 20101006; EP 2236245 A3 20130911; CN 101844328 A 20100929; JP 2010228058 A 20101014; KR 20100108254 A 20101006; TW 201103697 A 20110201; US 2010248597 A1 20100930
DOCDB simple family (application)
EP 10250452 A 20100311; CN 201010141121 A 20100325; JP 2009079630 A 20090327; KR 20100026642 A 20100325; TW 99107177 A 20100312; US 73290410 A 20100326