EP 2261391 A4 20130123 - PROCESSING APPARATUS AND PROCESSING METHOD
Title (en)
PROCESSING APPARATUS AND PROCESSING METHOD
Title (de)
VERARBEITUNGSVORRICHTUNG UND VERARBEITUNGSVERFAHREN
Title (fr)
APPAREIL DE TRAITEMENT ET PROCÉDÉ DE TRAITEMENT
Publication
Application
Priority
- JP 2009055818 W 20090324
- JP 2008078764 A 20080325
Abstract (en)
[origin: WO2009119580A1] Provided are a processing apparatus and a processing method wherein work processing efficiency is improved by improving efficiency of operations of carrying in and carrying out a work to and from a processing chamber. The processing apparatus is provided with a processing chamber (10) having a first carry in/out port and a second carry in/out port. The processing apparatus is also provided with a first transfer mechanism which performs operations of carrying in/out a work (30) through the first carry in/out port; a second transfer mechanism which performs operations of carrying in/out the work (30) through the second carry in/out port; a replacing means for transferring a work (30a), which is carried in by the first transfer mechanism and processed, to the second transfer mechanism, and transferring a work (32a), which is carried in by the second transfer mechanism and processed, to the first transfer mechanism; and a control section (22) which drives the first transfer mechanism and the second transfer mechanism, alternately supplies unprocessed work from the first carry in/out port and the second carry in/out port to the processing chamber, and processes the work.
IPC 8 full level
C23C 16/44 (2006.01); B65G 49/06 (2006.01); G02F 1/13 (2006.01); H01L 21/31 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); H01L 31/04 (2006.01)
CPC (source: EP KR)
B65G 49/064 (2013.01 - EP KR); B65G 49/067 (2013.01 - EP KR); H01L 21/67173 (2013.01 - EP KR); H01L 21/67201 (2013.01 - EP KR); H01L 21/67742 (2013.01 - EP KR); H01L 21/67745 (2013.01 - EP KR); H01L 21/67748 (2013.01 - EP KR); H01L 21/6776 (2013.01 - KR); B65G 2249/02 (2013.01 - EP KR)
Citation (search report)
- [XA] EP 1278230 A2 20030122 - APPLIED MATERIALS INC [US]
- [A] US 5178638 A 19930112 - KANEKO SATOSHI [JP], et al
- [A] US 5795399 A 19980818 - HASEGAWA MAKOTO [JP], et al
- [A] US 2003003767 A1 20030102 - KIM STEVEN [US], et al
- See also references of WO 2009119580A1
Designated contracting state (EPC)
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR
DOCDB simple family (publication)
WO 2009119580 A1 20091001; CN 102046840 A 20110504; CN 102046840 B 20120801; CN 102751158 A 20121024; CN 102751158 B 20150520; EP 2261391 A1 20101215; EP 2261391 A4 20130123; EP 2261391 B1 20171115; KR 101669685 B1 20161027; KR 20100134062 A 20101222
DOCDB simple family (application)
JP 2009055818 W 20090324; CN 200980119052 A 20090324; CN 201210207818 A 20090324; EP 09725876 A 20090324; KR 20107023727 A 20090324